5
Installation and Operation Manual
X-DPT-Profibus-Interface-eng
PN 541-C-068-AAG
November, 2008
TABLES
Table 2-1:
Brooks Smart Mass Flow Meters and Controllers.................................................. 11
Table 3-1:
Smart TMF main connector pin layout.................................................................. 15
Table 3-2:
Smart TMF Profibus-DP network connector pin layout...........................................
16
Table 3-3:
Supported baud rate values................................................................................. 20
Table 3-4:
Profibus cable parameters..................................................................................
20
Table 5-1:
Diagnostics message, extended data section layout.............................................
31
Table 5-2:
Diagnostics: Run-time message error bits............................................................
31
Table 5-3:
Diagnostics: Fatal system error bits....................................................................
32
Table 5-4:
Diagnostics: Primary non-fatal system error/alarm bits..........................................
33
Table 5-5:
Diagnostics: Secondary non-fatal system error/alarm bits...................................... 34
Table 5-6:
Diagnostics: Non-fatal ambient error/alarm bits.....................................................
34
Figures
Figure 3-1: Smart TMF main 15-pin male sub-D connector - pin numbering............................... 15
Figure 3-2: Profibus 9-pin female sub-D connector - pin numbering ........................................... 16
Figure 3-3: MF Profibus Main Power Connection ..................................................................... 17
Figure 3-4: Pinnumbering ...................................................................................................... 18
Figure 3-5: Smart Mass Flow Meter/Controller - Outlet view ...................................................... 18
Figure 3-6: Profibus line termination configuration .................................................................... 21
Figure 3-7: Recommended TEE and Terminator Resistor .......................................................... 21
Figure 3-8: High-speed communication inductors .................................................................... 22
