Azbil Micro Flow MQV0005, Руководство пользователя

Страница: 81 / 90

7-11
Chapter 7. SPECIFICATIONS
„
Relationship between differential pressure and flow rate (For Helium)
Condition : the valve is fully open in air.
z
MQV9020/9050/9500/0005
Differential pressure (kPa)
MQV9500 MQV9020/9050
Flow rate [L/min(standard)]
0 10 20 30 40 50 60
0.6
0.5
0.4
0.3
0.2
0.1
0
(1)
(1)
(2)
(2)
(3)
(3)
(4)
㈬
Differential pressure (kPa)
MQV0005
Flow rate [L/min(standard)]
0 10 20 30 40 50 60
(1) (2) (3)
(4)
6.0
5.0
4.0
3.0
2.0
1.0
0.0
100
80
60
40
20
0
0 12 20 16 24 8 4
Differential pressure (kPa)
Flow rate [L/min(standard)]
(4)
z
MQV0010/0050/0200
Differential pressure (kPa)
MQV0050
Flow rate [L/min(standard)]
60
50
40
30
20
10
0
(1)
(2)
(3)
(4)
Differential pressure (kPa)
MQV0200
Flow rate [L/min(standard)]
0 40 80 120 160 200
240
200
160
120
80
40
0
(1)
(2)
(3)
(4)
Differential pressure (kPa)
MQV0010
Flow rate [L/min(standard)]
0 40 80 120 160 200
12
10
8
6
4
2
0
(1)
(2) (3)
(4)
0 10 20 30 40 50 60
Outlet pressure condition
150 kPa(gauge)
50 kPa(gauge)
0 kPa(gauge)
-50 kPa(gauge) (1)
(2)
(3)
(4)