Azbil Micro Flow MQV0005, Руководство пользователя

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6-1
Chapter 6. TROUBLESHOOTING
„
Alarm code display
When a flow rate deviation alarm occurs or when an alarm occurs
during selfdiagnostics, the device forcibly switches to the operating
mode currently selected for “Operation selection at alarm occurrence”
(
c- 16
in the function setup).
Additionally, the alarm code and normal display are alternately shown
at the upper 4- digit portion of the 7-segment display.
Alarm
code
Problem Causes Remedy
al0 1
Flow rate deviation lower
limit alarm
Insufficient alarm judgment delay/
power voltage/inlet pressure, exces-
sive inlet pressure/operating tem-
perature, etc.
If items under causes do not help,
ask for repair.
al02
Flow rate deviation upper
limit alarm
Insufficient alarm judgment delay,
valve trouble, sensor trouble, etc.
Ask for repair if the delay is not a
problem.
al 1 1
Valve amperage lower limit
alarm
Insufficient alarm judgment delay,
alarm setting current value too high,
excessive inlet pressure, etc.
Set parameter setup again.
al 12
Valve amperage upper limit
alarm
Insufficient alarm judgment delay,
alarm setting current value too low,
insufficient power voltage, insuffi-
cient inlet pressure, etc.
Set parameter setup again.
al8 1
Sensor error 1
(Heater voltage error)
Sensor trouble, foreign object on sen-
sor, condensation on sensor, influx of
hydrogen or helium gas, etc.
Remove the probable causes.
If the device does not return to
normal operation even after the
power has been shutdown for a
while, ask for repair.
al82
Sensor error 2
(Measured flow rate signal
error)
Sensor trouble, foreign object on sen-
sor, back current, etc.
al83
Sensor error 3
(Sensor safety circuit
activated)
Sensor failure, excessive flow rate, ex-
cessive operating temperature (etc.)
al9 1
Calibration data error Data corrupted due to electrical
noise.
Ask for repair
al92
Sensor calibration data
error
Data corrupted due to electrical
noise.
Ask for repair
al93
User setting data error Power shut-off during user setup
data writing.
Set data again.
Handling Precautions
•
The alarm code is displayed only when the instantaneous flow
rate or totalized flow is displayed.
•
If a sensor error (
AL8 1
to
AL83
) occurs, the flow rate measure-
ment value will become indefinite. Therefore, the control flow
rate becomes indefinite even if "0, 1, -1: Control continued" was
selected for
c- 16
in the function setup.
•
When "2, -2: Forced fully closed" or "3, -3: Forced fully open" is
selected for
c- 16
in the function setup, the alarm display and op-
erating mode at alarm occurrence are retained. To reset the alarm,
perform the alarm reset operation.