Azbil Micro Flow MQV0005, Руководство пользователя

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1-7
Chapter 1. INTRODUCTION
„
Model selection guide
z
MQV9020/9050
Basic
model
Nos.
Standard con-
trol flowrate
range
Display
Material of
gas-contact-
ing parts
Connection
method
Gas
type
Optional
functions
Appended
No.
Description
1 2 3 4 5
MQV Digital mass flow controller
9020 0.2–20.0 mL/min (standard)
*1
9050 0.4–50.0 mL/min (standard) *1
B Integrated display (body length: 90 mm)
C Seprate display (body length: 90 mm)
S SUS316
S 1/4" Swagelok
V 1/4" VCR
H Hydrogen
*2
0 Without optional functions
0 Without optional functions
1 Model with RS-485 communications (CPL)
0 Without optional functions
1 Gas-contacting parts treated
to be oil free
0 Without optional functions
D With inspection certificate
Y With traceability certificate
0 Product version
z
MQV9500/0005/0010/0050/0200
Basic
model
Nos.
Standard con-
trol flowrate
range
Display
Material of
gas-contact-
ing parts
Connection
method
Gas
type
Optional
functions
Appended
No.
Description
1 2 3 4 5
MQV Digital mass-flow controller
9500 0.004–0.500 L/min (standard)
*1
0005 0.04–5.00 L/min (standard) *1
0010 0.10–10.00 L/min (standard)
*1
0050 0.4–50.0 L/min (standard) *1
0200 2–200 L/min (standard) *1
B Integrated display (body length 90 mm)
C Separate display (body length 90 mm)
S SUS316
R Rc 1/4"
S 1/4" Swagelok
V 1/4" VCR
U 9/16-18UNF
H Hydrogen
*2
0 Without optional functions
0 Without optional functions
1 Model with RS-485 communications (CPL)
0 Without optional functions
1 Gas-contacting parts treated
to be oil free
0 Without optional functions
D With inspection certificate
Y With traceability certificate
0 Product version
Notes: *1. The unit L/min (standard) indicates the volumetric flow rate per minute converted to 20 °C, 101.325 kPa (one
atmosphere). The reference temperature can also be changed to 0 °C, 25 °C and 35 °C.
*2. This device is set initially for hydrogen gas use at the factory. It can be used for helium gas by changing the gas
type setting.