Azbil Micro Flow MQV0005, Руководство пользователя

Страница: 74 / 90

7-4
Chapter 7. SPECIFICATIONS
z
MQV9500/0005/0010
Model No.
Item
MQV9500 MQV0005 MQV0010
Valve type Proportional solenoid valve
Valve operation Normally closed when de-energized (N.C.)
Standard full-scale flow rate * 1 0.500 L/min (standard) 5.00 L/min (standard) 10.00 L/min (standard)
Gas types Hydrogen (H
2
), Helium (He)
Gas must be dry and not contain corrosive components (chlorine, sulfur, acid).
The gas must also be clean, not containing dust or oil mist.
Control Range 1 to 100 % FS (see “Gas type and control range” table (page 7-9))
Valve output update cycle 5 ms
Response
(at standard differential
pressure)
Within 0.3 s at setting ±2% FS (typ.)
(Control starts from the fully closed status or the setting is changed during control.)
Accuracy
(at standard tempera-
ture and differential
pressure,
Q: flow rate)
(1) ±2.0 % FS (80 % FS < Q ≤ 100 % FS)
(2) ±1.0 % FS (40 % FS < Q ≤ 80 % FS)
(3) ±0.5 % FS (0 % FS ≤ Q ≤ 40 % FS)
Repeatability
(Q: flow rate)
(1) ±0.5 % FS (40 % FS < Q ≤ 100 % FS)
(2) ±0.25 % FS (0 % FS ≤ Q ≤ 40 % FS)
Temperature characteristics 0.06 % FS max. per 1°C
Pressure characteristics 0.2 % FS max. per 100 kPa
Pressure Standard differential
pressure
200 kPa (Inlet pressure: 200 kPa (gauge), outlet pressure: 0 kPa (gauge))
Required differential
pressure * 2
Hydrogen: 20 kPa
Helium: 40 kPa
Hydrogen: 80 kPa
Helium: 150 kPa
Operating differential
pressure range *
3
300 kPa max.
allowable inlet pres-
sure *
4
0.5 MPa (gauge)
Pressure resistance 1 MPa (gauge)
Temperature Standard operating
temperature
+23 °C
Allowable operating
temperature range
–10 to +60 °C
Allowable storage tem-
perature range
–20 to +70 °C
Humidity Allowable operating
humidity range
10 to 90 % RH (condensation not allowed)
External
leaks
Helium leak rate Within 1 x 10 -6 Pa·m 3 /s
Flow rate
setup
Setup method (1) Key operation (2) External analog input
(3) MLP loader communications* 5
(4) RS-485 communications (3 wire-system)* 6
Setup resolution
“Gas type and control range” table (page 7-9).
External analog input Input range: 0 to 5 V DC/1 to 5 V DC/0 to 20 mA/4 to 20 mA (switchable)
Input impedance: 1 MΩ ± 10% (for voltage input)
250 Ω ± 10% (for current input)