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Thank you for purchasing an Azbil

Corporation product.
This manual contains information

for ensuring the correct use of this

product. It also provides necessary

information for installation, main-

tenance, and troubleshooting.
This manual should be read by

those who design and maintain

equipment that uses this product.

Be sure to keep this manual nearby

for handy reference.

Digital Mass Flow Controller

for Hydrogen and Helium Gases

Model MQV9020/9050/9500/0005/

0010/0050/0200

User’s Manual

No. CP-SP-1205E

Содержание Micro Flow MQV0005

Страница 1: ...ecessary information for installation main tenance and troubleshooting This manual should be read by those who design and maintain equipment that uses this product Be sure to keep this manual nearby f...

Страница 2: ...is free from inaccuracies and omissions If you should find an error or omission please contact the azbil Group In no event is Azbil Corporation liable to anyone for any indirect special or consequent...

Страница 3: ...ed below Use caution when handling the product The indicated action is prohibited Be sure to follow the indicated instructions Handling Precautions Handling Precautions indicate items that the user sh...

Страница 4: ...is exclusively for hydrogen and helium gases It cannot be used for control or measurement of gases other than hydrogen helium and hydrogen helium mixtures excluding mixed gases within explosion limit...

Страница 5: ...safety circuit is acti vated flow rate measurement and flow control are not possible until the power is turned off and back on again If damage could result from the abnormal functioning of this device...

Страница 6: ...a risk of a power surge caused by lightning use Azbil Corporation s SurgeNon to prevent possible fire or equipment failure Gas type switching by external contact input flow rate switching and analog i...

Страница 7: ...o are in charge of hardware design and or maintenance of equipment containing the MQV should read this manual thoroughly This manual gives an overview of the product describes installation wiring oper...

Страница 8: ...ter describes installation mounting wiring and initial set tings of this device Chapter 4 BASIC OPERATION This chapter gives the basis of how to operate this device Chapter 5 ADVANCED OPERATION This c...

Страница 9: ...1 Mounting 3 2 Piping 3 7 Wiring 3 8 Chapter 4 BASIC OPERATION 4 1 4 1 Switching Displays 4 1 Basic operation 4 1 4 2 Setting the Flow Rate 4 4 Digital flow rate setup 4 5 Flow rate setup by external...

Страница 10: ...ter 6 TROUBLESHOOTING 6 1 Alarm code display 6 1 Troubleshooting guide 6 3 Chapter 7 SPECIFICATIONS 7 1 Individual specifications 7 1 Korea Certification Mark 7 8 Gas type and control range 7 9 China...

Страница 11: ...see page 7 17 Controller e g SDC25 26 24 V DC power supply e g WN790A MQV Separate display unit Front cover for separate display sold separately AC adapter sold separately Cable with dedicated connect...

Страница 12: ...itional functions The functions listed below are all standard Functions All MQV models have the functions described below For function setup Chapter 5 ADVANCED OPERATION Multi setup function setup C 0...

Страница 13: ...ction setup C 35 The lower and upper limits of the set value range can be set to de sired levels This prevents mistaken high low settings Slow start function setup C 1 7 Sudden changes in the controll...

Страница 14: ...an interlock signal for subsequent processes by as signing it to event output and including it in a sequence program PV filter function setup C 23 This function is used to average the detected instan...

Страница 15: ...forcibly open or close the valve fully by key operation external contact input or external 3 way switching input Automatic shut off function setup C 13 C 16 The valve can be shut off automatically und...

Страница 16: ...rent input is selected automatically 1 Internal reference 0 to 5 V input External reference 0 to 20 mA input 2 External reference 0 to 5 V input External reference 0 to 20 mA input 3 External referen...

Страница 17: ...s contact ing parts Connection method Gas type Optional functions Appended No Description 1 2 3 4 5 MQV Digital mass flow controller 9500 0 004 0 500 L min standard 1 0005 0 04 5 00 L min standard 1 0...

Страница 18: ...the device is used with the factory set tings no setup operation is needed However to change the gas type set a range set an external contact input set upper and lower alarm limits or set communicati...

Страница 19: ...SP lamp Lit when the flow rate setpoint is displayed L lamp 1 Lit when the totalized flow is displayed Blinks when the cumulative flow event occurs PV lamp Lit when the instantaneous flow rate is dis...

Страница 20: ...connection port outlet This is the port from which gas is discharged Jack for PC loader connection Connector port This is used for I O signals Use cable with dedicated connector Jack for AC adapter Co...

Страница 21: ...trol or measurement of gases other than hydrogen helium and hydrogen helium mix tures excluding mixed gases within explosion limits Oxygen cannot be measured even if gascontacting sections of this dev...

Страница 22: ...ocations whose atmospheres contain large amounts of dirt and dust salt conductive substances such as iron powder water droplet oil mist or organic solvents Locations subject to direct sunlight and rai...

Страница 23: ...off in step 2 5 To return the display to its original position on the main unit turn it 180 clockwise Handling Precautions Before changing the display direction be sure to turn the power OFF Prevent f...

Страница 24: ...e or the like gripped between rags to protect the finished surfaces and turn the joint to tighten The device may be damaged if the lower main unit is not secured Connector latches main unit Rag Handli...

Страница 25: ...rror or equipment failure MQV9020 9050 9500 0005 0010 0050 0200 Install the device with two M4 screws using the mounting holes on the base of the device Unit mm 30 15 4 5 z z Installing the separate d...

Страница 26: ...oving the appearance Items needed for installation Front cover 81446858 001 1 set Phillips screwdriver Mask Plate Separate display unit Mounting screws cross recessed head machine screws Panel Note Th...

Страница 27: ...measurement errors Handling Precautions Make sure that the gas flows into the device in the direction indi cated by the FLOW arrow on the main unit Otherwise the flow rate cannot be controlled correc...

Страница 28: ...put switching should be done only after setting the operation mode to fully closed Switching while controlling could cause large fluctuations Be sure to check that the wiring is correct before turning...

Страница 29: ...10 ALM OUT Alarm output 9 D GND Digital ground Digital signal common 8 DB RS 485 communications DB Do not connect on models without the communications function 7 DA RS 485 communications DA 6 D GND D...

Страница 30: ...relay Failure to do so might cause the device to malfunction External contact input 15 14 13 9 DI3 DI2 DI1 or 6 D GND Handling Precautions When switching by relay contact use an appropriate relay int...

Страница 31: ...g mode 2 Fully closed Control Fully open Switching of SP No SP 0 SP 1 SP 2 Switching of totalizing operation Continue counting Reset Stop counting Switching of analog I O voltage range Input Internal...

Страница 32: ...arm output Output common Instantaneous flowrate output 5 V 0 V OPEN DB DA SG Potentiometer 5 k Handling Precautions Do not input any signal to pin No 5 The power circuit is isolated from the input out...

Страница 33: ...is terminal block can be mounted directly on a DIN rail The following table shows the correspondence between connector pin Nos and terminal block Nos Handling Precautions For details regarding the cab...

Страница 34: ......

Страница 35: ...mp lit Valve amperage display SP PV L and L min lamps go out DISP key DISP key DISP key DISP key Handling Precautions If there is no operator input for approximately 10 seconds while the flow set valu...

Страница 36: ...alized flow value is indicated on the display When the totalized flow value is 10 000 or higher the number is displayed in two parts the last four digits followed by the first four digits When the val...

Страница 37: ...e even at the same flow rate The valve amperage alarm function cannot be used unless the differential pressure is stable Even under stable differential pressure conditions the rela tionship between th...

Страница 38: ...i setup In single setup the flow rate is set through key input or communi cations In multi setup the flow rate is set through the key input communications external contact input or external 3 way swit...

Страница 39: ...C 2 1 in the function setup In this case the ENT key need not be pressed to enter the SP value Handling Precautions When switching the display by pressing the DISP key first press the ENT key to enter...

Страница 40: ...Common to single setup and multi setup When 1 Analog setup is selected as the flow rate setup method C 03 in the function setup and the SP value is con trolled by external voltage input the SP value a...

Страница 41: ...ction setup Input 3 DI3 Input 2 DI2 Input 1 DI1 Selected SP External contact input state OFF OFF OFF SP 0 OFF OFF ON SP 1 OFF ON OFF SP 2 OFF ON ON SP 3 ON OFF OFF SP 4 ON OFF ON SP 5 ON ON OFF SP 6 O...

Страница 42: ...the function setup three SP values SP 0 to SP 2 can be changed with the external 3 way switching input as described in the table below External 3 way switching input state Selected SP OPEN SP 0 0 V S...

Страница 43: ...to 5 V External reference 0 to 20 mA Setup voltage V Setting flow rate Full scale flow rate x 5 Setup current mA Setting flow rate Full scale flow rate x 20 2 External reference 1 to 5 V External ref...

Страница 44: ...shown on the 7 segment display during instan taneous flow rate display Additionally the OK lamp blinks in the fully open mode Operation mode 7 segment display OK lamp Remarks Fully closed mode 0FF Out...

Страница 45: ...e valve is set to control mode by external contacts the op eration mode can be switched using the RUN key In the same manner if 1 or 5 operation mode switching is selected for external 3 way switching...

Страница 46: ......

Страница 47: ...ed mode When the operating mode changes to Function setup mode or Parameter setup mode the specified setup can be changed In the Device information display mode you can check the statuses of major set...

Страница 48: ...the 7 segment display and mode changes to the function setup mode 3 Press the or key to select the desired setup item number and then press the ENT key The current setting value blinks on the 7 segme...

Страница 49: ...not the oper ating mode is changed fully closed control fully open by the RUN key Additionally the operating mode at power ON can be selected For how to select the operating mode 4 3 Selecting the Op...

Страница 50: ...V instantaneous flow rate output 1 1 to 5 V instantaneous flow rate output 2 0 to 20 mA instantaneous flow rate output 3 4 to 20 mA instantaneous flow rate output 4 0 to 5 V setting flow rate output 5...

Страница 51: ...e control by contact ON forced fully closed by con tact OFF 9 Flow rate zero adjustment 10 Switching of gas type setup 11 Switching of flow rate range 12 Switching of SP ramp 13 Alarm reset 0 3 For de...

Страница 52: ...alarm output ON 2 Forced fully closed and alarm output ON 3 Forced fully open and alarm output ON 1 Control continued and alarm output ON 2 Forced fully closed and alarm output ON 3 Forced fully open...

Страница 53: ...p 1 0 Standard range 10 to 99 10 to 99 of stan dard range When calculating the range reduction the value is cut off at the least significant digit 10 to 99 10 to 99 of stan dard range When calculating...

Страница 54: ...rate at analog input out put 100 5 V can be optionally set The flow rate is set in parameter setup mode 5 2 Parameters P 5 12 C 29 Forced PV instantaneous flow rate zero function 0 Function disabled...

Страница 55: ...the settings in c 05 and c 06 the analog input and output ranges are changed as shown in the table below Setting in C 06 Settings in function setup C 05 0 1 2 0 0 to 5V internal reference input 0 to...

Страница 56: ...to 20 mA setting flow rate output 0 to 20 mA external reference input 0 to 20 mA setting flow rate output 4 to 20 mA external reference input 4 to 20 mA setting flow rate output 7 4 This setting can b...

Страница 57: ...the table below C 10 to C 12 settings Status of external contact input ON OFF 5 Fully closed mode Control mode Operation mode can be switched between control fully closed fully open using the RUN key...

Страница 58: ...nd the mode changes to the parameter setup mode 3 Press the or key to select the desired setup item num bers and press the ENT key The current setting blinks on the 7 segment display 4 Press the or ke...

Страница 59: ...0 0 100 to 9 999 C 26 C 18 C 26 11 a 1 HI 7 Valve amperage upper limit alarm 100 0 0 1 to 100 0 C 20 C 16 C 20 At the factory setting alarms are not detected Handling Precautions P 5 15 12 a 1 lO 7 Va...

Страница 60: ...tion setup can be set 4 These alarms can be set when 1 to 3 is set for flow rate alarm setup type c 15 and valve am perage alarm setup type c 20 in the function setup 5 T his cannot be set when 0 Not...

Страница 61: ...ge are the full scale value multiplied by the ratio in parenthe ses The setting range differs according to model number and gas type Handling Precautions The valve amperage changes greatly according t...

Страница 62: ...eous flow rate is displayed and the PV and L min mL min on the MQV9020 9050 lamps light 2 Hold down the key for three seconds or more The GA5 is displayed on the 7 segment display and the mode changes...

Страница 63: ...factor for each gas type set by the user 9 Hydrogen 10 Helium C 18 C 26 2 f 5Cl Full scale flow rate 10 to 100 of standard range C 18 C 24 C 25 C 26 Unit L min standard mL min standard on the MQV9020...

Страница 64: ...0 1 21 0 01 12 00 6 05 0 05 12 00 6 05 0 05 120 0 60 5 0 5 1 200 0 605 0 005 10 00 6 05 0 05 6 00 3 02 0 02 6 00 3 02 0 02 60 0 30 2 0 2 0 600 0 302 0 002 6 00 3 02 0 02 3 00 1 00 0 01 3 00 1 00 0 01...

Страница 65: ...or analog current a higher resolution can be set than in the digital setup Analog setup signal Flow rate setup resolution 0 to 5 V or 0 to 20 mA About 1 3700 of the full scale flow rate 1 to 5 V or 4...

Страница 66: ......

Страница 67: ...p again al8 1 Sensor error 1 Heater voltage error Sensor trouble foreign object on sen sor condensation on sensor influx of hydrogen or helium gas etc Remove the probable causes If the device does not...

Страница 68: ...2 Chapter 6 TROUBLESHOOTING z z Alarm reset operation When the ENT key is kept pressed continuously while the instanta neous flow rate is being displayed the alarm is reset after 3 seconds have elapse...

Страница 69: ...he regulator Apply the instantaneous PV filter func tion setup C 23 Use larger diameter pipe Change the check valve to one having a low cracking pressure Adjust the operating differential pres sure se...

Страница 70: ...ized to zero after completely replacing the inside of the flow path with the gas to be controlled Note Flow rate zero adjustment can be performed by external contact input by selecting flow rate zero...

Страница 71: ...7 1 Chapter 7 SPECIFICATIONS Individual specifications Please go to the next page...

Страница 72: ...S 0 5 FS Temperature characteristics 0 06 FS max per 1 C Pressure characteristics 0 2 FS max per 100 kPa Pressure Standard differential pressure 100 kPa Inlet pressure 100 kPa gauge outlet pressure 0...

Страница 73: ...switching input Input type number of inputs External 3 way switching input OPEN 0 V 5 V 1 External contact input 2 way switching 3 Required circuit type Non voltage contact or open collector Contact O...

Страница 74: ...100 FS 2 0 25 FS 0 FS Q 40 FS Temperature characteristics 0 06 FS max per 1 C Pressure characteristics 0 2 FS max per 100 kPa Pressure Standard differential pressure 200 kPa Inlet pressure 200 kPa ga...

Страница 75: ...L 1 pulse 0 1 L 1 pulse 1 L 1 pulse External switching input Input type number of inputs External 3 way switching input OPEN 0 V 5 V 1 External contact input 2 way switching 3 Required circuit type N...

Страница 76: ...200 kPa Inlet pressure 200 kPa gauge outlet pressure 0 kPa gauge Required differential pressure 2 Hydrogen 20 kPa Helium 40 kPa Hydrogen 100 kPa Helium 180 kPa Operating differential pressure range 3...

Страница 77: ...3 Required circuit type Non voltage contact or open collector Contact OFF termi nal voltage External 3 way switching input 2 5 0 5 V External contact input 2 8 0 5 V Contact ON terminal current Appro...

Страница 78: ...P 7 9 2 Minimum requisite differential pressure for control of full scale flow rate condition outlet pres sure 0 kPa gauge 3 Operation is possible even below the required differential pressure but the...

Страница 79: ...n standard Setup display resolution L min standard Control flow rate range L min standard Setup display resolution L min standard Control flow rate range L min standard Setup display resolution L min...

Страница 80: ...5 10 15 20 25 30 1 2 3 4 6 0 5 0 4 0 3 0 2 0 1 0 0 0 100 80 60 40 20 0 0 6 8 12 10 4 2 Differential pressure kPa Flow rate L min standard z z MQV0010 0050 0200 Differential pressure kPa MQV0050 Flow r...

Страница 81: ...30 40 50 60 1 2 3 4 6 0 5 0 4 0 3 0 2 0 1 0 0 0 100 80 60 40 20 0 0 12 20 16 24 8 4 Differential pressure kPa Flow rate L min standard 4 z z MQV0010 0050 0200 Differential pressure kPa MQV0050 Flow ra...

Страница 82: ...kPa gauge and outlet pressure is 80 kPa gauge P1 201 3 kPa abs P2 181 3 kPa abs P2 P1 0 901 Q 2 091 X 201 3 181 3 X 181 3 126 L min standard Optional parts sold separately Item Model No Remarks Cable...

Страница 83: ...8 141 4 Rc 1 4 fitting 2 Fitting made by Swagelok 2 SS 400 1 6STSC11 Applicable pipe outside diameter 1 4 material SUS316 23 5 23 5 25 7 25 7 137 HEX21 HEX9 16 Rc 1 4 connection type 9 16 18UNF conne...

Страница 84: ...22 81 18 5 15 5 141 4 Rc 1 4 fitting 2 23 5 23 5 25 7 25 7 137 HEX21 HEX9 16 Rc 1 4 connection type 9 16 18UNF connection type 1 4 Swagelok connection type 130 150 2 90 102 35 14 30 0 5 30 0 5 11 0 5...

Страница 85: ...utout dimensions recommended OK SP PV m3 Digital Mass Flow Controller L min ALM EV1 EV2 RUN ENT DISP 38 105 93 5 4 5 12 5 6 19 R z z Cable for connecting display to main unit Unit mm 2000 min Oki Elec...

Страница 86: ...Color pin No 1 red pin Nos 5 10 and 15 green others gray Pin arrangement 2000 min Contact HIROSE ELECTRIC CO LTD HIF3 2226SCC 20 P ces compatible lead AWG 22 to 26 z z 20 wire shielded cable 81446951...

Страница 87: ...6 m a x 40 3 22 Hexagonal nut M9 Internally toothed washer 3 Mounting hole dimensions 3 2 4 LOCK Mounting screw M3xP0 5 Shaft hole diameter 16 5 1 5 10 5 14 26 1 12 44 1 26 1 18 max 15 2 19 05 3 175 2...

Страница 88: ......

Страница 89: ...Revision History CP SP 1205E Printed Edn Revised pages Description Dec 2006 1 Apr 2012 2 Company name changed Sep 2017 3 Overall revision June 2019 4 Overall revision 4th ed 16th Jp ed...

Страница 90: ...Specifications are subject to change without notice 10 1st edition Dec 2006 U 4th edition June 2019 V...

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