Azbil Micro Flow MQV0002, Руководство пользователя

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6-1
„  Alarm code display
When a flow rate deviation alarm occurs or when an alarm occurs during self-
diagnostics, the device forcibly switches to the operating mode currently selected
for “Operation selection at alarm occurrence” (
c- 16
in the function setup).
Additionally, the alarm code and normal display are alternately shown at the upper
4-digit portion of the 7-segment display.
Alarm Code Problem Causes Remedy
AL0 1
Flow rate deviation lower limit
alarm Insufficient alarm judgment delay/power
voltage/inlet pressure, excessive inlet
pressure/operating temperature, etc. If items under causes do not
help, ask for repair.
AL02
Flow rate deviation upper limit
alarm Insufficient alarm judgment delay, valve
trouble, sensor trouble, etc. Ask for repair if the delay is not
a problem.
AL 1 1
Valve amperage lower limit
alarm Insufficient alarm judgment delay, alarm
setting current value too high, excessive
inlet pressure, etc. Set parameter setup again.
AL 12
Valve amperage upper limit
alarm Insufficient alarm judgment delay,
alarm setting current value too low,
insufficient power voltage, insufficient
inlet pressure, etc. Set parameter setup again.
AL 7 1
Valve overheat prevention limit
operation The gas is forcibly closed outside for 5
minutes or longer in the control or fully
open mode. If you close the gas
continuously from the outside,
set the setting flow rate to zero
(0) or put the valve in the fully
closed mode.
AL8 1
Sensor error 1
(Heater voltage error) Sensor trouble, foreign object on sensor,
condensation on sensor, influx of
hydrogen or helium gas, etc. Remove the probable causes.
If the device does not return
to normal operation even after
the power has been shutdown
for a while, ask for repair.
AL82
Sensor error 2
(Measured flow rate signal error) Sensor trouble, foreign object on sensor,
back current, etc.
AL9 1
Adjustment data error Data corrupted due to electrical noise. Ask for repair
AL92
Sensor calibration data error Data corrupted due to electrical noise. Ask for repair
AL93
User setup data error Power shut-off during user setup data
writing. Set data again.
Handling Precautions
•
The alarm code is displayed only when the instantaneous flow rate or totalized
flow is displayed.
•
AL7 1
(valve overheat prevention limit operation) is activated only in the
MQV0050(J, K)/0200(J, K)/0500(J, K). At this time, the current to the valve is
forcibly limited regardless of the selection of
c- 16
in the function setup.
•
If a sensor error (
AL8 1
or
AL82
) occurs, the flow rate measurement value will
become indefinite. Therefore, the control flow rate becomes indefinite even if
"0, 1, -1: Control continued" was selected for
c- 16
in the function setup.
Chapter 6. MAINTENANCE AND TROUBLESHOOTING