Azbil Micro Flow MQV0002, Руководство пользователя

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1-7
Chapter 1. INTRODUCTION
„  Model selection guide
„ z
MQV9005/9020
Basic
model
No.
Standard
control
flowrate
range
Display
Material of
gascontacting
parts
Connection
method
Gas
type
Optional
functions
Appended
No.
Description
1 2 3 4 5
MQV Digital mass flow controller, MQV
9005 0.10 to 5.00 mL/min (standard)
*1, *4
9020 0.2 to 20.0 mL/min (standard)
*1, *4
B Integrated display (body length 90 mm)
C Separate display (body length 90 mm)
S SUS316
S 1/4" Swagelok
V 1/4" VCR
N Air, nitrogen
*2, *4
S Oxygen
*3, *4
0 Without optional functions
0 Without optional functions
1 Model with RS-485 communications
(CPL) function
0 Without optional functions
0 Without optional functions
1 Gas-contacting parts treated to be oil
free
*5
0 Without optional functions
D With inspection certificate
Y With traceability certificate
0 Product version
*1. mL/min (standard) indicates the volumetric flow rate per minute (mL/min) converted to conditions of 20 ˚C and
101.325 kPa (1 atm). The reference temperature can be changed to 0, 25, or 35 ˚C.
*2. Air/nitrogen is the factory setting. By changing the setting, this model can be used for argon.
*3. Oxygen is the factory setting. By changing the setting, this model can be used for air/nitrogen, argon. However, once
this device has been used for gas other than oxygen, never reuse it for oxygen.
*4. The flow rate ranges in the table are for use of this device with air. The controllable flow range may vary depending
on the type of gas.

Gas type and control range (P. 7-11).
*5. When oxygen is selected as the gas type, selection “1,” “gas-contacting parts treated to be oil free,” must be selected
for Optional function 4.