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Azbil Micro Flow MQV0002, Руководство пользователя

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™

Thank you for purchasing an Azbil 

Corporation product.
This manual contains information for 

ensuring the correct use of this product. 

It also provides necessary information 

for installation, maintenance, and 

troubleshooting.
This manual should be read by those who 

design and maintain equipment that uses  

this product. Be sure to keep this manual 

nearby for handy reference.

No. CP-SP-1204E

Digital Mass Flow Controller 

Standard Gas Model

MQV9005/9020/9200/9500 

0002/0005/0020/0050/0200/0500

User’s Manual

Содержание Micro Flow MQV0002

Страница 1: ...necessary information for installation maintenance and troubleshooting This manual should be read by those who design and maintain equipment that uses this product Be sure to keep this manual nearby...

Страница 2: ...has been made to ensure that this manual is free from inaccuracies and omissions If you should find an error or omission please contact the azbil Group In no event is Azbil Corporation liable to anyon...

Страница 3: ...ons listed below Use caution when handling the product The indicated action is prohibited Always follow the indicated instructions Handling Precautions Handling Precautions indicate items that the use...

Страница 4: ...d compatible gases be sure to contact the azbil Group in advance Prevent foreign matter from entering the device If rust water droplet oil mist or dust in the pipes enters the device measurement or co...

Страница 5: ...2SC11 1 2 VCR SS 8 VCR 1 8STSC11 or equivalent Observe the following when using the device oil free model for oxygen gas Piping should be carried out by a specialist skilled in handling oxygen gas Use...

Страница 6: ...event fire or equipment failure Gas type switching by external contact input flow rate switching and analog input output voltage range switching by external 3 way input switching should be done only a...

Страница 7: ...oller in instrumentation should read this manual This manual outlines the product tells how to install wire and incorporate the product into instrumentation and describes its operation inspection and...

Страница 8: ...describes installation mounting wiring and initial settings of this device Chapter 4 BASIC OPERATION This chapter gives the basis of how to operate this device Chapter 5 ADVANCED OPERATION This chapt...

Страница 9: ...ING AND WIRING Mounting 3 2 Piping 3 6 Wiring 3 7 Chapter 4 BASIC OPERATION 4 1 Switching Displays 4 1 Basic operation 4 1 4 2 Setting the Flow Rate 4 4 Digital flow rate setup 4 5 Flow rate setup by...

Страница 10: ...ions After Change of Range 5 17 Setup resolution in the analog setup 5 18 Chapter 6 MAINTENANCE AND TROUBLESHOOTING Alarm code display 6 1 Troubleshooting guide 6 2 Chapter 7 SPECIFICATIONS Specificat...

Страница 11: ...ply e g WN790A MQV Separate display unit Front cover for separate display sold separately AC adapter sold separately Cable with dedicated connector sold separately Device Configuration Features High s...

Страница 12: ...tch to one of eight preset flow set value by key operation or external input If Switching of SP No is set to external 3 way switching input up to three set values can be switched Gas type switching fu...

Страница 13: ...up C 09 to C 12 MQV9005 in 0 1 mL units MQV9020 in 1 mL units MQV9200 9500 in 0 01 L units MQV0002 0005 in 0 1 L units MQV0020 0050 in 1 L units MQV0050 J K in 0 001 m3 units MQV0200 0500 in 0 01 m3 u...

Страница 14: ...band can be set to the desired level Valve amperage display function setup C 20 The electric current supplied to the valve can be displayed in units of 0 0 to 100 0 Additionally use of the valve ampe...

Страница 15: ...pened Handling Precautions The valve on this device cannot completely shut off If complete shutoff is required provide a shutoff valve separately Automatic reset of cumulative count at start of contro...

Страница 16: ...ge selection function setup C 06 C 09 Output can be set either to instantaneous flow rate PV or flow set value SP Furthermore a voltage current output range can be selected from 1 to 4 shown below by...

Страница 17: ...ee 5 0 Without optional functions D With inspection certificate Y With traceability certificate 0 Product version 1 mL min standard indicates the volumetric flow rate per minute mL min converted to co...

Страница 18: ...certificate 0 Product version 1 L min standard and mL min standard indicate the volumetric flow rate per minute L min and mL min converted to conditions of 20 C and 101 325 kPa 1 atm The reference tem...

Страница 19: ...101 3 kPa abs The reference temperature can also be changed to 0 C 25 C or 35 C 2 Air nitrogen is the factory setting By changing the setting this model can be used for argon carbon dioxide CO2 city...

Страница 20: ...he device is used with the factory settings no setup operation is needed However to change the gas type set a range set an external contact input set upper and lower alarm limits or set communication...

Страница 21: ...o the function setup mode key Use this key to increment the setting value Additionally this key is used to change to the device information display mode key Use this key to move to a desired digit whe...

Страница 22: ...s Use cable with dedicated connector Main unit MQV0050 J K 0200 0500 Jack for PC loader connection Jack for AC adapter Connect dedicated adapter here Model No 81446957 001 24 V DC 750 mA Pipe connecti...

Страница 23: ...Doing so might damage it Be sure to use within the flow rate range stipulated in the product specifications To prevent excessive flow use a suitable means to control the supply pressure or use a thro...

Страница 24: ...device is a precision instrument Do not drop it or subject it to impact or it might be damaged Mounting z z Installation locations Avoid mounting the device in the following locations Locations subjec...

Страница 25: ...re changing the display direction be sure to turn the power OFF Prevent foreign objects from falling inside the main unit when the display is taken off Failure to do so might cause trouble or malfunct...

Страница 26: ...event vibration Otherwise equipment failure could result Mount the device horizontally Do not mount it with the display facing down Doing so might cause measurement error or equipment failure z z MQV9...

Страница 27: ...models with a separate display a front cover decorative frame can be mounted Use of this cover makes it possible to hide the mounting screws improving the appearance Items needed for installation Fro...

Страница 28: ...cting check that there are no gas leaks If using Rc connections take care not to coat with too much sealant Foreign matter or burrs in the pipes may also cause measurement errors Handling Precautions...

Страница 29: ...hing and analog input output voltage range switching by external 3 way input switching should be done only after setting the operation mode to fully closed Switching while controlling could cause larg...

Страница 30: ...2 Open collector non insulated output 11 EV1 OUT Event output 1 10 ALM OUT Alarm output 9 D GND Digital ground Digital signal common 8 DB RS 485 communications DB Do not connect on models without the...

Страница 31: ...relay Failure to do so might cause the device to malfunction External contact input 15 14 13 9 DI3 DI2 DI1 or 6 D GND Handling Precautions When switching by relay contact use an appropriate relay int...

Страница 32: ...losed Control Fully open Switching of SP No SP 0 SP 1 SP 2 Switching of totalizing operation Continue counting Reset Stop counting Switching of analog I O voltage range Input Internal reference 0 to 5...

Страница 33: ...Alarm output Output common Instantaneous flowrate output 5 V 0 V OPEN DB DA SG Potentiometer 5 k Handling Precautions Do not input any signal to pin No 5 The power circuit is isolated from the input...

Страница 34: ...terminal block can be mounted directly on a DIN rail The following table shows the correspondence between connector pin Nos and terminal block Nos Handling Precautions For details regarding the cable...

Страница 35: ...PV L and L min lamps go out DISP key DISP key DISP key DISP key Handling Precautions If there is no operator input for approximately 10 seconds while the flow set value is being displayed the display...

Страница 36: ...four digits the decimal point on the display is lit up For example when the totalized flow value is 123 456L 3 4 5 6 is displayed Press the DISP key to display 1 2 To alternately display the first an...

Страница 37: ...es below the lower limit value The valve amperage upper and lower limits are set in the parameter setup mode For details on function setup and parameter setup Chapter 5 ADVANCED OPERATION Handling Pre...

Страница 38: ...flow rate is set through key input or communications In multi setup the flow rate is set through the key input communications external contact input or external 3 way switching input One flow set val...

Страница 39: ...2 1 in the function setup In this case the ENT key need not be pressed to enter the SP value Handling Precautions When switching the display by pressing the DISP key first press the ENT key to enter t...

Страница 40: ...s Common to single setup and multi setup When 1 Analog setup is selected as the flow rate setup method C 03 in the function setup and the SP value is controlled by external voltage input the SP value...

Страница 41: ...P 2 OFF ON ON SP 3 ON OFF OFF SP 4 ON OFF ON SP 5 ON ON OFF SP 6 ON ON ON SP 7 2 When the number of SP values is set to 3 or 4 in function setup C 04 Assign 3 Switching of SP No to two of C 10 to C 12...

Страница 42: ...the function setup three SP values SP 0 to SP 2 can be changed with the external 3 way switching input as described in the table below External 3 way switching input state Selected SP OPEN SP 0 0 V S...

Страница 43: ...V External reference 0 to 20 mA Setup voltage V Setting flow rate Full scale flow rate x 5 Setup current mA Setting flow rate Full scale flow rate x 20 2 External reference 1 to 5 V External referenc...

Страница 44: ...instantaneous flow rate display Additionally the OK lamp blinks in the fully open mode Operation mode 7 segment display OK lamp Remarks Fully closed mode Out OFF is always displayed after checking tha...

Страница 45: ...0 to C 12 in the function setup changes by external contact take precedence over RUN key operation In the same manner when operating mode change 1 or 5 is selected for external 3 way switching functio...

Страница 46: ......

Страница 47: ...he operating mode changes to Function setup mode or Parameter setup mode the specified setup can be changed In the Device information display mode you can check the statuses of major setup items gas t...

Страница 48: ...the 7 segment display and mode changes to the function setup mode 3 Press the or key to select the desired setup item number and then press the ENT key The current setting value blinks on the 7 segme...

Страница 49: ...gital setup set by key operation or communications 1 Analog setup set by external analog input voltage 0 1 C 04 Number of flow set value number of SPs selection 0 Number of SPs 1 SP 0 only 1 Number of...

Страница 50: ...open mode 7 ON in fully closed mode 8 PV upper limit event 9 PV lower limit event 1 10 PV lower limit event 2 1 to 10 Inverse output of above 1 to 10 Normal operation ON Event occurrence OFF 0 The ev...

Страница 51: ...valid 9 Set the operation mode to full close or set the flow rate to zero and perform the contact ON operation for a minimum of 10 seconds lFlow rate zero adjustment P 6 3 10 C 18 becomes active by co...

Страница 52: ...rgon 4 Carbon dioxide CO2 5 Natural gas 13A LNG 1 Heating value 46 MJ m3 6 100 propane 7 100 methane 8 100 butane 11 Natural gas 13A LNG 2 Heating value 45 MJ m3 See Remarks An initial gas type is set...

Страница 53: ...roved by reducing the flow rate range 5 4 Flow Rate Range Change Function and Settings and Display Resolutions After Change of Range P 5 17 for details If a value of 10 to 99 is set the value is cut o...

Страница 54: ...0 The flow rate at analog input output 100 5 V can be optionally set The flow rate is set in parameter setup mode 5 2 Parameters P 5 11 C 29 Forced PV instantaneous flow rate zero function 0 Function...

Страница 55: ...to the settings in c 05 and c 06 the analog input and output ranges are changed as shown in the table below Settings in C 06 Settings in function setup C 05 0 1 2 0 0 to 5 V internal reference input...

Страница 56: ...e output 3 4 0 to 5 V internal reference input 0 to 5 V setting flow rate output 0 to 5 V external reference input 0 to 5 V setting flow rate output 1 to 5 V external reference input 1 to 5 V setting...

Страница 57: ...mode changes to the parameter setup mode 3 Press the or key to select the desired setup item numbers and press the ENT key The current setting blinks on the 7 segment display 4 Press the or key to cha...

Страница 58: ...flow rate deviation lower limit alarm hysteresis 2 FS 0 5 to 100 FS 2 3 14 14 7 a dly Flow rate deviation alarm valve amperage alarm judgment delay time 10 0 s 0 5 to 999 9 s C 15 C 16 C 20 4 8 e 1 dl...

Страница 59: ...ets the flow rate corresponding to 100 of analog input output 5V Unit L min standard mL min standard for theMQV9005 9020 9200 10 14 14 18 E a lO Cumulative flow event setting last 4 digits 0 0 to 9999...

Страница 60: ...e flow event has been selected as event output type in c 07 or c 08 in the function setup or when 1 Function enabled has been selected for the automatic valve shut off function upon occurrence of the...

Страница 61: ...stantaneous flow rate is displayed and the PV and L min lamps light the mL min lamp lights on the MQV9005 9020 9200 2 Hold down the key for three seconds or more The GA5 is displayed on the 7 segment...

Страница 62: ...on 4 Carbon dioxide CO2 5 Natural gas 13A LNG 1 Heating value 46 MJ m3 6 100 propane 7 100 methane 8 100 butane 11 Natural gas 13A LNG 2 Heating value 45 MJ m3 c 18 c 26 2 f Scl Full scale flow rate 1...

Страница 63: ...e L min Resolution L min Full scale flow rate L min Resolution L min Full scale flow rate L min Resolution L min Full scale flow rate L min Resolution L min 5 00 to 3 02 0 02 50 0 to 30 2 0 2 2 00 to...

Страница 64: ...or analog current a higher resolution can be set than in the digital setup Analog setup signal Flow rate setup resolution 0 to 5 V or 0 to 20 mA About 1 3700 of the full scale flow rate 1 to 5 V or 4...

Страница 65: ...s or longer in the control or fully open mode If you close the gas continuously from the outside set the setting flow rate to zero 0 or put the valve in the fully closed mode AL8 1 Sensor error 1 Heat...

Страница 66: ...ze Operating differential pressure range is exceeded Lower the primary pressure Inlet pressure fluctuates greatly Regulator interference Insert a regulator upstream Change the pressure setting on the...

Страница 67: ...zero and fully close the valve 3 Continue pressing the ENT key in this state 4 After about 10 seconds 0 cal is indicated on the display After about one second release the ENT key 5 The display changes...

Страница 68: ......

Страница 69: ...7 1 Specifications Shown on next page Chapter 7 SPECIFICATIONS...

Страница 70: ...0 5 Temperature characteristics with air 0 06 FS max per 1 C Pressure characteristics with air 0 2 FS max per 100 kPa Pressure Standard differential pressure 100 kPa inlet pressure 100 kPa gauge outle...

Страница 71: ...inputs External 3 way switching input OPEN GND 5V 1 External contact input 2 way switching 3 Required circuit type Non voltage contact or open collector Contact OFF terminal voltage External 3 way swi...

Страница 72: ...eatability Q flow rate 1 0 5 FS 50 FS Q 100 FS 2 0 25 FS 0 FS Q 50 FS Temperature characteristics with air 0 06 FS max per 1 C Pressure characteristics with air 0 2 FS max per 100 kPa Pressure Standar...

Страница 73: ...lse 0 1 L 1 pulse External switching input Input type number of inputs External 3 way switching input OPEN GND 5V 1 External contact input 2 way switching 3 Required circuit type Non voltage contact o...

Страница 74: ...25 FS 0 FS Q 50 FS Temperature characteristics with air 0 06 FS max per 1 C 0 08 FS max per 1 C Pressure characteristics with air 0 4 FS max per 100 kPa 0 2 FS max per 100 kPa Pressure Standard differ...

Страница 75: ...e 1 L 1 pulse External switching input Input type number of inputs External 3 way switching input OPEN GND 5V 1 External contact input 2 way switching 3 Required circuit type Non voltage contact or op...

Страница 76: ...s with air 0 08 FS max per 1 C Pressure characteristics with air 0 2 FS max per 100 kPa Pressure Standard differential pressure 20 kPa inlet pressure 20 kPa gauge outlet pressure 0 kPa gauge 200 kPa i...

Страница 77: ...3 way switching input OPEN GND 5V 1 External contact input 2 way switching 3 Required circuit type Non voltage contact or open collector Contact OFF terminal voltage External 3 way switching input 2 5...

Страница 78: ...e flow rate range becomes narrower Relationship between differential pressure and flow rate P 7 12 6 For the advisability of using an inlet pressure of 0 5 MPa gauge or more contact the azbil Group 7...

Страница 79: ...ard Setup display resolution L min standard Control flow rate range L min standard Setup display resolution L min standard Control flow rate range L min standard Setup display resolution L min standar...

Страница 80: ...essure kPa Flow rate L min standard 0 10 20 30 40 50 60 0 0 0 4 0 8 1 2 1 6 2 0 2 4 Differential pressure kPa Flow rate L min standard MQV0002 MQV9200 MQV9500 Outlet pressure condition 1 150 kPa gauge...

Страница 81: ...2 P1 0 53 Q C2 P1 P1 Inlet absolute pressure kPa abs P2 Outlet absolute pressure kPa abs Absolute pressure gauge pressure 101 3 kPa Q Flow rate L min standard mL min standard for MQV9005 9020 9200 C1...

Страница 82: ...V DC 750 mA Operating temperature range 0 to 40 C Potentiometer for flow rate setting 81446683 002 5 k with digital dial 10 turns Front cover for separate display unit 81446858 001 Mask 1 piece Plate...

Страница 83: ...coupling made by Swagelok 2 SS 400 1 6ST Applicable pipe outside diameter 1 4 material SUS316 23 5 23 5 25 7 25 7 137 HEX21 HEX9 16 Rc 1 4 connection type 9 16 18UNF connection type 1 4 Swagelok conne...

Страница 84: ...pe coupling made by Swagelok 2 SS 810 1 8ST Applicable pipe outside diameter 1 2 material SUS316 3 4 16UNF connection type Rc 1 2 connection type 1 2 Swagelok connection type Rc 1 2 pipe coupling 2 25...

Страница 85: ...coupling 2 23 5 23 5 25 7 25 7 137 HEX21 HEX9 16 Rc 1 4 connection type 9 16 18UNF connection type 1 4 Swagelok connection type 130 90 102 35 14 M4 screw 2 depth 5 min 137 8 23 9 23 9 1 4 VCR connecti...

Страница 86: ...1 2 Swagelok connection type 1 2 VCR connection type Rc 1 2 pipe coupling 2 25 25 150 HEX 26 30 7 30 7 150 31 5 31 5 150 1 2 VCR pipe couple made by Swagelok 2 SS 8 VCR 1 8STSC11 or equivalent 3 4 16...

Страница 87: ...38 33 105 93 5 4 5 12 5 M4 2 6 19 R Mounting panel cutout dimensions recommended 100 0 2 50 0 2 45 0 2 90 0 2 35 0 2 17 5 0 2 z z Cable for connecting display to main unit Unit mm 2000 min Oki Electr...

Страница 88: ...lor pin No 1 red pin Nos 5 10 and 15 green others gray Pin arrangement 2000 min Contact HIROSE ELECTRIC CO LTD HIF3 2226SCC 20 P ces compatible lead AWG 22 to 26 z z 20 wire shielded cable 81446951 00...

Страница 89: ...6 m a x 40 3 Hexagonal nut M9 Internally toothed washer 3 Mounting hole dimensions 3 2 4 LOCK Mounting screw M3xP0 5 Shaft hole diameter 5 10 5 14 12 26 1 16 5 1 26 1 44 1 18 max 15 2 19 05 3 175 10...

Страница 90: ......

Страница 91: ...MQV 1 8 1 9 Change in note 2 4 1 Handling Precautions changed 5 9 Tables in notes 2 and 3 changed 5 14 Addition to note 14 5 17 MVQ9005 9020 added Explanation added 6 2 Changes and additions to the T...

Страница 92: ...documents provided by Azbil Corporation are for your reference purpose only and you are required to check the functions and safety of your Equipment prior to your use 3 Measures to be taken to secure...

Страница 93: ...struments sensors such as pressure flow level sensors regulating valves etc will reach the end of their life due to aged deterioration of parts For those parts that will reach the end of their life du...

Страница 94: ...Specifications are subject to change without notice 10 1st edition Apr 2006 7th edition Sep 2018 V...

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