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**** Caution 3 ****
Fil. burn out
Trouble symptom
Troubleshooting
Corrective action
1)
Is ion source connector
securely connected?
1) Securely
reconnect
connector.
Both filaments 1 and 2
have burnt out.
Emission current cannot
be obtained due to ion
source deterioration or
contamination.
2) Check if filament has burnt
out. (Refer to 6-2-5
Maintenance of ion source.)
2) If burnt out, replace ion source
with a new one.
3) Check ion source to see it is
discolored or contaminated.
3) If discolored or contaminated,
replace ion source with a new
one.
4) Check if test port pressure
was increased abruptly during
test.
4) Overload protective circuit
was actuated by pressure rise
and filament was judged to
have burnt out. Restart.
**** Caution 4 ****
PiG failure
Trouble symptom
Troubleshooting
Corrective action
Pirani gauge sensor head
has burnt out.
1) Is Pirani gauge sensor head
connected securely?
1) Securely
reconnect
connector.
2) Check if Pirani sensor head
has burnt out. (Refer to 6-2-4
Maintenance of Pirani gauge
sensor head.)
2) If burnt out, replace sensor
head with a new one.
3) Check ion source to see it is
discolored or contaminated.
3) Sensor head may have burnt
out.
4) Check if water, water vapor,
oil mist, etc. are admitted into
HELIOT.
4) If sensor head filament is
contaminated, it will be
judged to have burnt out.
Replace it with a new one.
**** Caution 5 ****
Ext. power trip
Trouble symptom
Troubleshooting
Corrective action
External power line has
tripped.
1) Check if external power
supply protector on connector
panel has tripped.
1) If it has tripped, press
protector to reset it.
Summary of Contents for HELIOT 301
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