Ulvac HELIOT 301, Instruction Manual

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**** Notice 6 ****
Sens. fault
Trouble symptom Troubleshooting Corrective action
Sensitivity is not normal. 1) Check if instrument was
started with piping and test
object connected to test port.
1) Connect blank flange to test
port at startup.
2) Check if there is any leak in
test port connection.
2) Check flange and O-ring for
scar and dust contamination.
3) Check if ion source is
discolored or contaminated.
3) Replace ion source and its
packing with new ones.
4) Check if focus electrode cap
screw was tightened when
replacing ion source.
4) Tighten focus electrode cap
screw.
5) Check if ion source slit is
discolored or contaminated.
5) Polish discolored or
contaminated portion with
sandpaper of about #400.
6) Is ion source flange installed
in correct orientation?
6) Match the position of
labeled on flange with that on
analyzer tube flange and
install source flange so that
analyzer tube and slit intersect
at right angles.
7) Are input value of calibration
leak (built in) and value on
calibration leak label in
agreement?
7) Check input value against
value on calibration leak label
on connector panel.
* If trouble cannot be corrected
by steps 1) through 7) above,
contaminated piping interior is
suspected. Overhaul is
required.