Ulvac HELIOT 301, Instruction Manual

Page: 78 / 96

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**** Notice 4 ****
G. flow invalid
Trouble symptom Troubleshooting Corrective action
1) Check if there is any leak
when test object is connected.
1) Check connection for dust,
scar, etc.
Gross leak flow cannot be
executed. (Test port
pressure does not lower.
Pressure fault has
occurred.)
2) Check if pressure rise has
occurred during test.
2) Gross leak flow will be in
error if pressure rise occurs at
above 500 Pa with sensitivity
H and at above 1000 Pa with
sensitivity L. Set sensitivity
at L.
* If error has occurred at a
setting of sensitivity L in 2)
above, the test object cannot be
tested for leak using HELIOT
alone.
Maximum connecting pressure
of 1000 Pa at L setting is the
maximum connecting pressure
of HELIOT.