Ulvac HELIOT 301, Instruction Manual

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!
CAUTION
Weight on piping
When connecting piping, test object, etc. to the test port, keep the test port
free from weight.
!
CAUTION
Air vent
A blast fan is provided in the rear panel to cool the instrument interior, and
air vents are provided in the right and left side panels.
Provide a space more than 200 mm from the wall to all panels. Plugging
the air vents will increase the inside temperature and may damage the
equipment.
!
CAUTION
Ambient temperature
Operate the instrument at an ambient temperature of 10°C to 40°C.
!
CAUTION
Dust contamination
Before installing the blank flange, make sure that the flange seat surface
and O-ring are free form scars and dust.
Leak may lead to malfunction.
!
CAUTION
Use of blank flange
Use a blank flange when starting up the instrument.
If the instrument is started with the piping and test object connected, it may
not operate properly.
!
CAUTION
Line voltage
The line voltage is to be 100 VAC ± 10% and the maximum rated current is 10
A. Check it before installation.
!
CAUTION
No vibration
Keep the instrument free from vibration or impact from surrounding
equipment. The instrument may be damaged.
!
CAUTION
Electrical connection
Make electrical wiring after completing installation.
!
CAUTION
Setting timing
Before changing the setting of the DIP switch, turn off the main power. If
the instrument is operated with the main power turned on, malfunction and
damage to the equipment can result.
!
CAUTION
DIP switch
DIP switch No. 2, No. 3, No. 4 and No. 6 are used for system setting. Do
not change them.
Malfunction and damage to the equipment can result.
!
CAUTION
Setting timing
Before changing the setting of the SEN. switch, turn OFF the main power
(compound molecular pump at stop). If the setting is changed
immediately after end of stop mode (compound molecular pump is still
rotating) and the instrument is restarted, malfunction may result.
!
CAUTION
Input switch
To press the membrane switches on the controller,
use your finger pad. Pressing it with nail or a sharp object can damage
the equipment.
!
CAUTION
Sensitivity calibration
Before making sensitivity calibration, attach a blank flange to the test port.
If sensitivity calibration is made with piping of high capacity connected to
the test port, sensitivity error can result.