Ulvac HELIOT 301, Instruction Manual

Page: 77 / 96

- 67 -
7-2 Notice
**** Notice 1 ****
Error
Trouble symptom Troubleshooting Corrective action
Action cannot be executed
according to setting.
1) Check if test is executed
without making automatic
sensitivity calibration after
filament is changed over.
1) Test cannot be executed unless
automatic sensitivity
calibration is made after
filament is changed.
**** Notice 2 ****
F. flow invalid
Trouble symptom Troubleshooting Corrective action
1) Check if there is any leak
when test object is connected.
1) Check connection for dust,
scar, etc.
Fine leak flow cannot be
executed. (Test port
pressure does not lower.
Pressure fault has
occurred.)
2) Check if pressure rise has
occurred during test.
2) Fine low will be in error if
pressure rise occurs at above 3
Pa with sensitivity H and at
above 10 Pa with sensitivity L.
Select other flow.
**** Notice 3 ****
M. flow invalid
Trouble symptom Troubleshooting Corrective action
1) Check if there is any leak
when test object is connected.
1) Check connection for dust,
scar, etc.
Middle leak flow cannot
be executed. (Test port
pressure does not lower.
Pressure fault has
occurred.)
2) Check if pressure rise has
occurred during test.
2) Fine low will be in error if
pressure rise occurs at above
18 Pa with sensitivity H and at
above 70 Pa with sensitivity L.
Select other flow.