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10. WARRANTY
This instrument has been shipped after rigorous inspection at the factory, but if any trouble
due to defects in material or workmanship should occur within twelve (12) months from the
date of delivery, ULVAC will correct it free of charge.
However, operation that runs counter to the instructions in this manual, careless operation (for
example, damage of the compound molecular pump by abrupt venting during test),
unauthorized modification of the instrument, force majeure and consumables are not covered
by this warranty.
<Consumables out of warranty>
(1)
O-rings and packings used in HELIOT
(2)
Ion source (B-A type)
(3)
Pirani gauge sensor head (WP-01)
(4)
Rotary pump oil (R-2)
(5)
Compound molecular pump oil (Wick holder PM073 073-T)
<Repair after warranty period and order of consumables>
Contact your local ULVAC representative or ULVAC.
<Technical questions>
For technical questions and servicing, please contact your local ULVAC representative or
ULVAC.
* The contents of this manual are subject to change without notice.
* This manual has been prepared carefully, but if you come up with any question or find any
error or omission, please contact your local ULVAC representative or ULVAC.
Summary of Contents for HELIOT 301
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