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**** Notice 5 ****
Evacuation fault
Trouble symptom
Troubleshooting
Corrective action
Roughing is not
completed with three
minutes.
1) Check if there is any leak
when test object is connected.
1) Check connection for dust,
scar, etc.
Compound molecular
pump does not start. (in
startup mode)
2) Check if leak rate of test
object is too high.
3) Refer to "Caution 2 Main
pump trip" for verification.
2)
a) Gross flow and auto flow will
be in error if pressure does not
lower to below 500 Pa with
sensitivity H to below 1000 Pa
with sensitivity L.
b) Middle leak flow will be in
error if pressure does not
lower to below 18 Pa with
sensitivity H and to below 70
Pa with sensitivity L within
three minutes.
c) Fine leak flow will be in error
if pressure does not lower to
below 3 Pa with sensitivity H
and to below 10 Pa with
sensitivity L within three
minutes.
* If error has occurred at a setting
of sensitivity L in 2) above, the
test object cannot be tested for
leak using HELIOT alone.
Maximum connecting pressure
of 1000 Pa at L setting is the
maximum connecting pressure
of HELIOT.
Consider installation of a fore
pumping system.
Summary of Contents for HELIOT 301
Page 88: ......
