System control: Equipment
2-16
User Manual
C O N F I D E N T I A L –
limited rights
Feb 2018
Revision A
Stage movement limits
The motorized movements of the stage can be operated under software control for more advanced location
mapping. This includes
Shift
,
Get
,
Track
and
Stage
module functionality. A live image can be repositioned either by
the stage movement or by the
Beam Shift
.
Note
When moving the stage or tilting the specimen, the magnification may need to be reduced so as to not lose the feature of
interest from the screen.
FIGURE 2-7:
Stage movement schema
C a u t i o n !
The positive Z value direction depends on the Link Z to FWD status (see Chapter 5).
C a u t i o n !
If the maximum sample size is near the limit, stage tilt can be limited. Beware of hitting the objective pole piece!
Table 2-3:
Stage features and limits
Item
110 × 110 mm
Note
X
-55 to +55 mm
Y
-55 to +55 mm
Z
66 mm
R
360°
continuous
T
-15° to +90°
maximally
Eucentric distance
10 mm
Maximum sample weight
No restriction: 500 g
including stub holder
No Tilt: 2 000 g
X and Y movements only: 5 000 g
