Operating Procedures: Stage Control
5-32
User Manual
C O N F I D E N T I A L –
limited rights
Feb 2018
Revision A
4.
Repeat step 3 for the sample user point (1,0) and (0,1) if needed.
Using 1 / 2 / 3 Point(s) Alignments
Table 5-4:
Alignment Type Differences
Use
1 Point Alignment
2 Points Alignment
3 Points Alignment
Major Use
Aligning to new point
directly offset from
the existing location
Aligning the stage axes with
the specimen X-Y orientation
to correct any distortion
Transforming to nonstandard
units on dies or RAM arrays;
to correct any distortion
Change in Scale
None
Scales the axes together
X can be scaled differently from Y
Change in
Orientation
None
Rotates both axes with a fixed
90° angle between axes
X and Y orientation
can be different
