System Options: Plasma Cleaner
7-35
C O N F I D E N T I A L
– limited rights
User Manual
Revision A
Feb 2018
Sample Cleaning Procedure
1.
Move the stage to the lowest Z-axis position and tilt it to zero.
This is to avoid any possible shadowing effect by the column if the sample is at a short working distance.
2.
Run the
Tools
menu /
Sample Cleaning
procedure.
It is also possible to enter the procedure from the vented state by using the
Sample Exchange
window. While the
procedure is in progress, stage moves are disabled temporarily.
When the procedure is finished or aborted by a user, the system remains pumped.
3.
Move stage back to the observation position.
When starting the procedure, some conditions are not allowed. In these cases,
a dialog or tooltip appears onscreen.
When Plasma Cleaning is started from the LoVac mode, the chamber is partly
pumped to a lower pressure. The user is asked to confirm this action before
Plasma Cleaning is started.
Note
When one is going to observe in LoVac immediately after plasma cleaning with a different gaseous environment, we advise
running the Purging procedure (see Chapter 3). 4
Chamber Cleaning
To periodically clean the whole system (due to build-ups from samples, carriers, service events, etc.), use the
Chamber Cleaning procedure from the
Plasma Cleaning
Alignment. The clean chamber environment enables an
operator to use the system at a level of cleanliness suitable for high-resolution imaging and analysis.
C a u t i o n !
Never use Plasma Cleaner for Chamber Cleaning with CryoCleaner filled with LN2!
W A R N I N G !
Do not exceed 30 minutes of chamber cleaning once a week at most when the DBS detector is installed.
