7-1
C O N F I D E N T I A L
– limited rights
User Manual
Revision A
Feb 2018
7
System Options
This chapter covers hardware and software that is an option either integrated in, or accessory to the Apreo system
(not all options are described here).
•
Support PC –
connects your workspace to the network and can hold some other software utilities.
•
Manual User Interface (MUI)
– provides direct manual control of microscope parameters such as focus,
magnification, contrast, brightness, beam shift and correcting astigmatism.
•
Joystick
– brings another possibility for controlling the basic stage movements.
•
Electron Beam Current Measurement
•
External Scan Interface
•
Quick Loader
•
Nav-Cam
•
Patterning
•
Gas Injection System
– Platinum Deposition, Tungsten Deposition, Insulator Deposition II, Delineation Etch,
Insulator Enhanced Etch, Enhanced Etch, Carbon Deposition, Selective Carbon Mill, Gold
•
Uninterruptible Power Supply
•
Mains Matching
and Isolation Transformer –
provides a galvanic isolated AC-regulated power source with the 115 /
230 V, 50 / 60 Hz output.
•
Compressor
120 V / 230 V, 50 / 60 Hz 4-litre Tank
•
Thermo Neslab Water Cooler
50 Hz / 60 Hz
•
Acoustic Enclosure
for Pre-vacuum Pump
•
Specimen Holder Kit
•
Set of 20 Specimen Stubs for SEM’s
•
UMB Stub Holder Kit
•
CryoCleanerEC
+ spare vessel – anti-contamination device
•
Plasma Cleaner
•
Annular STEM
detector – allows detection of electrons transmitted through the sample. The regular voltage
range which of course is dependent on the sample thickness, is from 30 kV down to around 5 kV.
•
Universal Lift-out Holder
for STEM observation
•
Trinity detector (T3)
– In Column detector especially suitable for the Beam Deceleration mode
•
Directional Backscattered Detector (DBS) – Angular (ABS)
/ Concentric (CBS)
•
Thermal Printer Kit
•
Remote Control / Imaging
•
VolumeScope
•
SIS Scandium Image
software
•
SIS Scandium
desktop license
•
Scandium Solution Height
software – enables creating of a topographic map of a sample
•
SIS webRacer –
allows regular users with ID / passwords (provided by the supervisor) to view and retrieve
worldwide database data, using any internet browser and any computer system (PC, Apple, Sun…).
•
ResolveRT
•
DualBeam Course
– Acht
•
Apreo Course
– Hillsboro, Oregon / China / Japan
•
Advanced Course DualBeam
– Acht
•
DualBeam Short Course
- Acht
•
On-site Training
/
Support
- 1 day – North America / China / Japan
For further up-to-date information on system options please contact your local Thermo Scientific representative.
