System Options: Optional Detectors
7-10
User Manual
C O N F I D E N T I A L –
limited rights
Feb 2018
Revision A
Settings for STEM 3 / 3+ Detector
The detector works best under slow scan conditions.
1.
Position the desired sample grid in the field of view using the
ETD. Focus and link Z coordinate to FWD.
2.
Select the
Detector Settings
module /
Detector
list box /
STEM 3
/ STEM 3+
detector.
3.
Insert the STEM 3 / 3+ detector.
Bright Field
1.
Click on the
Bright Field
radio button.
2.
Adjust the contrast and brightness. An image should be visible
at low magnification.
3.
Change the voltage to suit the contrast necessary over the
sample.
For example, light materials (poly-silicon or silicon oxide) may
work better with 5 – 10 kV to create contrast, while dense
materials (metals) might require 10 – 20 kV or higher.
4.
Set the desired magnification, fine focus and correct the
astigmatism.
Dark Field 1 / 2 / 3 / 4
In this mode, it is possible to use separate segments by selecting
the appropriate radio button.
1.
Obtain a Bright Field image first.
2.
Click on the
Dark Field
1
/
2
/
3
/
4
radio button.
3.
Adjust the contrast and brightness.
HAADF (High Angle Annular Dark Field)
This mode may require higher voltage to create a suitable image,
as the angle subtended to the detection diode can be wide.
Choosing 2× the value used for Bright field is a good guide level.
HAADF segments cannot be combined with DF or BF.
1.
Obtain a Bright Field image first.
2.
Click on the
HAADF
radio button.
