-100-
No.PF
※※
-OMA1007
■
Error display
Error name
Error display
Description
Measures
Instantaneous flow
error
Flow rate exceeding the upper limit
of the settable flow range is applied.
Reset the applied flow rate to a level
within the settable flow range.
Pressure error
Pressure exceeding the upper limit
of the set pressure range is applied.
Reset the applied pressure to a level
within the set pressure range.
Pressure below the lower limit of the
set pressure range is applied.
Temperature error
Temperature exceeding the upper
limit of the set temperature range is
applied.
Reset the applied temperature to a
level within the settable temperature
range.
Temperature below the lower limit of
the set temperature range is
applied.
Hardware error
Internal hardware error detected.
Power cycle.
If the display still shows an error,
contact SMC.
System error
An internal data error has occurred.
Turn the power off and on again.
If the failure cannot be solved,
contact SMC.
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