STP-H803/H1303 Series Instruction Manual
LCD Messages
Probable Causes
Countermeasures
Referred
Section
DRIVER Overload
The motor driver overload.
(when the rated operation does
not start approx. 30 min. after
start operation is executed:
ACCELERATION state
continues for approx. 30 minutes:
1) High pressure at the inlet
port
2) High pressure at the outlet
port
3) Leakage of the piping
system
4) Failure of the backing
pump
1) Use the maximum
working pressure or
less.
2) Use the allowable
backing pressure or
less.
3) Check the vacuum
piping system for
leakage.
4) Check the backing
pump for its
capacity and START
state (use a pump
with the
recommended
capacity or more)
4.3.4
13.1
4.3.4
13.1
4.3.4
13.1
4.3.4
13.1
DRIVER Overvoltage
Failure of the STP control unit. Contact Service office.
Malfunction
information
DRIVER Sensor Lost
Failure of the STP control unit. Contact Service office.
Malfunction
information
DRIVER com. Failure
Failure of the STP control unit. Contact Service office.
Malfunction
information
DSP->PCB com fail
Failure of the STP control unit. Contact Service office.
Malfunction
information
Disturbance X_B
Disturbance X_H
Disturbance Y_B
Disturbance Y_H
Disturbance Z
Abnormal magnetic bearing:
1) Change of the cable length
2) Disconnection of the STP
connection cable or control
circuit error
1) When changing the
cable length,
perform tuning.
2) Contact Service
office.
9.1
Malfunction
information
Excessive vibration applied
externally to the STP pump:
1) External vibration/impact.
2) Atmospheric air flows the
STP pump
3) Foreign materials fall into
the STP pump
1) Remove external
vibration so as not
to transmit it to the
STP pump.
2) Check the vacuum
piping.
3) Install the STP
pump in a way that
no foreign materials
fall into the STP
pump.
4.3.4
4.3.4
4.2.1
EPROM Error
Failure of the STP control unit. Contact Service office.
Malfunction
information
T
ro
ub
le
sh
oo
tin
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11-4
