STP-H803/H1303 Series Instruction Manual
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6.5
Connecting to Semiconductor Equipment
The STP pump is a component system when installing to the semiconductor
equipment.
Consider the followings when designing the semiconductor equipment.
6.5.1
Connecting to Power
The STP control unit receives its power from the semiconductor equipment
electrical distribution system via a circuit breaker.
Electrical energy isolation (Lockout/Tagout) is achieved by opening the main
disconnect device or circuit breaker of the semiconductor equipment, thereby:
removing power from the STP pump.
Provide the equipment with the main disconnect or circuit breaker devices rated
for at least 10,000 A
rms
symmetrical amperes interrupting capacity (AIC).
6.5.2
Emergency Off Circuit (EMO Circuit)
Activation of EMO circuit of the equipment will interrupt electrical power from
the STP control unit.
When the power is shut off, the STP pump performs the same as a power failure.
(After backup operation of a power failure, the rotor lands on the touch down
bearing)
Consider the followings when establishing the EMO circuit.
◇
Unite the exhaust gas system to prevent atmosphere from being
introduced into the STP pump when the EMO circuit operates.
(example: shut the valve) When atmosphere is introduced into the
STP pump, the touch down bearing may not operate normally.
◇
The STP pump rotates for a while after the EMO circuit shuts off the
power. Perform a recovery operation after the STP pump has
stopped completely.
◇
Before performing the operation check of the EMO circuit with
regular maintenance, stop the STP pump to prevent damage to the
touch down bearing.
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