Seiko Seiki STPH1303C Instruction Manual Download

Page: 26 / 125

STP-H803/H1303 Series Instruction Manual

Installation

Installation of the STP Pump

4.1

Name and Function of Each Part

(1) Inlet Port Flange (VG

, ICF

, ISO, and other)

・

Connected to the vacuum equipment (at the high vacuum side).

(2) Outlet Port Flange (KF

40)

・

Connected to the inlet port side of the backing pump.

(3) STP Connector (60 pins)

・

Connected to the STP connection cable.

(4) Purge Port (KF

10)

・

Introduces a purge gas.

In order to protect the inside of the STP pump when pumping
reactive or corrosive gases.
The STP pump is delivered with a blank flange attached to this port.

(5) Cooling Water Port (PT

∗

(RC

) 1/4 Female Screw)

･

Connected to the STP pump cooling water pipe.

This port is used when water cooling the STP pump or using the
TMS

∗

unit.

(6) Temperature Sensor Connector (optional accessory)

・

A temperature sensor is attached.

For use with the Temperature Management System (TMS

∗

) unit

only (usually, a connector is not attached).

: JIS

: JVIS

∗

: Conform to ISO

∗

: Temperature Management System

4-1

Summary of Contents for Seiki STPH1303C

Page 1: ...Crawley West Sussex RH10 2LW UK Telephone 44 0 1293 528844 Fax 44 0 1293 533453 http www bocedwards com Instruction Manual Seiko Seiki STPH803C H1303C H803CI P033 Turbomolecular Pump System Document n...

Page 2: ...ll rights reserved Printed in Japan STP H803 H1303 Series Turbomolecular Pump Second Edition f INSTRUCTION MANUAL Read through the Safety Precautions and each section of this Manual carefully before u...

Page 3: ...YMBOLS The following symbols are used in this manual Death or Serious Personal Injury Failure to follow the guidelines marked with this symbol may result in death or serious personal injury Minor Pers...

Page 4: ...plosive combustible toxic corrosive etc And keep MSDS and a safety advice of gas supplier Warn of the danger of the gas with the warning label when the use gas is hazardous chemical materials Always e...

Page 5: ...nance such as replacement of fuses Perform inspections such as deposit and or the air cooling fan or Perform investigations into probable causes and action measures taken in the event of occurrence of...

Page 6: ...different serial numbers an error message is indicated when they are used without tuning And the tuning is necessary when the length of the STP connection cable is changed They may not function normal...

Page 7: ...result in product damage Perform investigations into probable causes and remove them before restarting the STP pump in the event of the occurrence of a problem The use of the abnormal STP pump may re...

Page 8: ...pecification STP H803C High throughput type chemical specific 1 STP H803CV High throughput type chemical specific TMS unit 2 attached STP H1303C High throughput type chemical specific STP H1303CV High...

Page 9: ...ral Requirements PRECAUTIONS 1 No part of this manual may be reproduced in any form by any means without prior written permission from BOC Edwards 2 BOC Edwards pursues a policy of continuing improvem...

Page 10: ...tion or maintenance other than that specified herein 2 Failure to follow any of the warnings or cautions enumerated under or 3 Installation operation or maintenance using parts which are not specified...

Page 11: ...ts of the use 14 Any direct incidental or consequential damage resulting from the use of the product 15 When continuously operated without overhaul after the WARNING indication WARNING message on the...

Page 12: ...ironment 4 3 4 2 2 Installation Area 4 4 4 2 3 Bench 4 4 4 3 How to Install the STP Pump 4 6 4 3 1 Cleaning the Seal 4 7 4 3 2 STP Pump Installation Positions 4 8 4 3 3 How to Secure the STP Pump 4 9...

Page 13: ...r a Safety Function Operates 7 6 7 6 Operating the TMS Unit For use with the TMS unit only 7 7 7 6 1 Starting Stopping 7 7 7 6 2 Temperature Control 7 7 8 Remote Input Output Signal Connector 8 1 8 1...

Page 14: ...isplay Function 11 11 11 6 Maintenance and Inspection 11 12 11 6 1 Cleaning and Decontamination 11 13 11 6 2 Inspecting the Deposit 11 14 11 6 3 Overhaul 11 15 11 6 4 Transporting for Repair or Overha...

Page 15: ...Output Signal Pins 8 4 Table 8 3 Rated Contacts for Relays CR1 to CR8 8 7 Table 9 1 Data List 9 2 Table 10 1 States of Lamps and REMOTE Output Signals at a Power Failure 10 2 Table 10 2 Operations of...

Page 16: ...Figure 5 1 Attaching Positions of the Cooling Unit and Baking Heater 5 4 Figure 6 1 STP Control Unit Front Panel 6 3 Figure 6 2 STP Control Unit Rear Panel 6 5 Figure 6 3 Peripheral Space of the STP C...

Page 17: ...ses to be used referring to the Material Safety Data Sheet MSDS you obtain from the gas supplier And keep MSDS and a safety advice of gas supplier CAUTION Introduce a dry N2 gas purge gas to protect t...

Page 18: ...ated type of cables CAUTION 2 STP Control Unit Caution Label This label describes precautions for operating the STP control unit Follow these precautions No Adjust levitation according to instruction...

Page 19: ...instruction manual WARNING 5 STP Control Unit Safety Instruction Label This label describes instructions before operating the STP control unit SAFETY INSTRUCTIONS Read instruction manual before operat...

Page 20: ...P pump rotates in this direction ROTATION 8 High Voltage Device Caution Label The STP control unit is equipped with a high voltage device This label warns operators to pay attention to the high voltag...

Page 21: ...nstructs operators so as not to touch the hot surface of the STP pump The use of the TMS unit may lead to a considerable rise in temperatures outside the STP pump This label warns operators so as not...

Page 22: ...bearing consists of 5 pairs of active magnetic bearings The rotor is supported in the radial direction by 4 pairs of radial direction active magnetic bearings that consist of radial sensor 3 and radi...

Page 23: ...Manual Installation 7 Touch down bearing 1 Rotor blade 2 Stator blade 3 Radial sensor 7 Touch down bearing 4 Radial electromagnet 3 Radial sensor 6 Axial electromagnet 5 Axial sensor Figure 2 1 Cross...

Page 24: ...tting hole attached to the inlet port flange Lift it with the aid of a suspension tool under the base when installing the STP pump without fitting hole Observe national laws regulations safety standar...

Page 25: ...or STP connection cable 1 1 With both side connectors Inlet port cover 1 Outlet port cover 1 STP connector cover 1 Blank flange for purge port 1 KF10 Clamping ring for purge port 1 KF10 O ring washer...

Page 26: ...roduces a purge gas In order to protect the inside of the STP pump when pumping reactive or corrosive gases The STP pump is delivered with a blank flange attached to this port 5 Cooling Water Port PT...

Page 27: ...1303 Series Instruction Manual Installation 6 Temperature sensor connector 5 Cooling water port 3 STP connector 4 Purge port 2 Outlet port flange 1 Inlet port flange Figure 4 1 Configuration of the ST...

Page 28: ...p is used in an area with radiation contact BOC Edwards Install the STP pump in a place meeting the following requirements Ambient Temperature 0 to 40 C Ambient Relative Humidity 30 to 95 no dew conde...

Page 29: ...essively The L type STP connection cable is also offered Contact BOC Edwards if necessary 4 2 3 Bench A bench must be prepared by the customer to secure the STP pump The shape and size of the bench di...

Page 30: ...ith the customer application NEVER move them while the STP pump is in operation Confirm the dimensions by the external appearance of the STP pump when designing the bench The bolt may not be able to b...

Page 31: ...Port Flange Vacuum Valve Dry Pump and other Pump Outlet Port STP Connection Cable Power Cable To Power Supply STP Control Unit Remote Cable To Vacuum Equipment Control Circuit Front Panel Vacuum Equip...

Page 32: ...ent alcohol Dispose of the contaminated wipes appropriately according to the regulations of each national and or local government The splinter shield cannot perfectly prevent foreign materials from fa...

Page 33: ...en installing the STP pump in a horizontal or slanted position it is recommended to install it so that the direction of the outlet port is on a vertical or horizontal plane in the direction of the gra...

Page 34: ...ange Refer to 2 When securing the inlet port flange with claw clamps Refer to 1 When securing the inlet port with bolts Secure the inlet port with Claw Clamps with bolts No Yes Damper In some cases th...

Page 35: ...104 Base 8 positions securing No Yes No Yes No Yes Type of bolt R D S B 2 Standard R D S B 2 Standard Standard Standard Type of steel 1 Carbon steel Alloyed steel Stainless steel Carbon steel Alloyed...

Page 36: ...bottom 2 When securing the inlet port flange with claw clamps Refer to Table4 2 for rotational torque When securing the inlet port flange with only the claw clamp the vacuum equipment cannot withstan...

Page 37: ...legs or all 8 attached legs Follow CAUTION on page 4 9 about legs and bolts for securing the base When the base cannot be secured because of the equipment design install the pump with a torque restra...

Page 38: ...as possible to keep the gas loss as low as possible 4 It is recommended to use a backing pump of pumping speed 1300 L min or more However the pressure at the inlet and outlet ports varies with the flo...

Page 39: ...en the STP pump outlet port flange and the backing pump Attach an absorption trap adjacent to the vacuum valve Attach an absorption trap adjacent to the vacuum valve Piping at the Inlet Port Flange Pi...

Page 40: ...p As shown in Figure 4 9 introduce a dry N2 gas through the electromagnetic vent valve needle valve or similar valve must be prepared by the customer from the purge port For instructions on how to int...

Page 41: ...cluding Li gases including Ga Hg In or Sn or HBr contact BOC Edwards Cool the STP pump to prevent the STP pump from overheating when pumping gases 5 1 1 How to Introduce a Purge Gas When pumping react...

Page 42: ...water containing foreign materials may corrode or clog the cooling water pipe When the cooling system is clogged with foreign materials clogs may possibly be removed by feeding cooling water reversibl...

Page 43: ...vacuum equipment and the inner wall of the STP pump run the STP pump during baking 5 3 1 Attaching a Baking Heater 1 Install the backing heater special accessory near the inlet port flange in the per...

Page 44: ...STP H803 H1303 Series Instruction Manual Installation Baking Heater PT RC 1 4 Cooling Water Port Figure 5 1 Attaching Positions of the Cooling Unit and Baking Heater 5 4...

Page 45: ...ELECT Switch flat panel switch gray LCD display Confirmation mode change function valid in both MANUAL and REMOTE operations Setting mode change function valid in both MANUAL and REMOTE operations Pre...

Page 46: ...ed operation NORMAL OPERATION state 12 BRAKE Lamp green LED Lights during deceleration BRAKE state 13 POWER Lamp green LED Lights while the power is ON Goes out while the backup power is being supplie...

Page 47: ...Instruction Manual Installation STP CONTROL UNIT ON RESET UP SELECT DOWN ENTER START STOP ACCEL BRAKE POWER TEMP CTRL NORMAL FAILURE REMOTE 1 2 3 4 5 6 7 8 9 10 12 13 14 15 11 16 Figure 6 1 STP Contro...

Page 48: ...er input 18 MAIN POWER Breaker Switches ON OFF the primary power 19 P CONNECTOR Connector X1 A maximum voltage 79VAC For connection of the STP connection cable 20 REMOTE Connector X7 A maximum voltage...

Page 49: ...as A place free of radiation A place free of strong magnetic and electric fields A place free of excessive vibration A place free of a source of electric noise Installation Condition Install the STP c...

Page 50: ...ubber feet Space for connecting the cables Rear 11 5 cm or more The minimum bending radius of the STP connection cable is 100 mm See Section 13 External Appearance of the STP Control Unit Cable Space...

Page 51: ...ack to protect the STP control unit during transport remove the rubber foot from the bottom and attach the STP control unit to the rack using the screw holes for the rubber foot The STP control unit c...

Page 52: ...54 100 105 97 STP Pump Side STP Control Unit Side 20 6 60 Pin L Type Connector STP Connection Cable Pin 60 Pin Socket Blue label see NOTICE Figure 6 5 External Dimensions of Each Cable There are two t...

Page 53: ...PE L L1 Crimp Type Terminal Lug Power Cable 8 1 54 36 51 25 3 Pin Socket M4 1 a without power plug 1 STP Control Unit Side Power Side Primary 1 5mm2 3 cores 8 1 Blown Blue Yellow Green or 8 8 Black1 B...

Page 54: ...e to each pin and DO NOT cause any short circuiting between pins Connect each cable securely DO NOT place heavy objects on the cables nor bend them excessively Support each cable so as not to apply di...

Page 55: ...Black2 Single phase 200 to 240 V AC 10 Both 50 60 Hz PE Yellow Green Ground Rear Panel AC POWER Outline of Connector L PE N Confirm the power voltage on the name plate Connect the power cable securel...

Page 56: ...pting capacity AIC 6 5 2 Emergency Off Circuit EMO Circuit Activation of EMO circuit of the equipment will interrupt electrical power from the STP control unit When the power is shut off the STP pump...

Page 57: ...d wiring of cables the STP pump is ready for start Check the following items before starting 1 Are the STP pump and the STP control unit secured according to the appropriate method 2 Is the power cabl...

Page 58: ...operations are frequently performed the STP pump may overheat Avoid doing so 7 3 Stop Procedures Close the vacuum valve located at the outlet port flange side just before or after stopping the STP pum...

Page 59: ...and the rotor levitates POWER ON state The POWER lamp lights 2 The STP control unit executes the self test If no error is found the LCD displays Levitation In case of the STP pump with the TMS unit op...

Page 60: ...amps of ACCEL NORMAL and BRAKE are off The magnetic bearing stops the rotor lands and the POWER lamp goes out POWER OFF state In case of the STP pump with the TMS unit optional accessory the TEMP CTRL...

Page 61: ...t executes the self test If no error is found the LCD displays Levitation In case of the STP pump with the TMS unit optional accessory the TEMP CTRL lamp also lights and the TMS unit starts 7 5 2 Star...

Page 62: ...essory the TEMP CTRL lamp also goes out and the TMS unit stops 7 5 5 Starting the STP Pump after a Safety Function Operates A safety function operates when an abnormality error occurs in the STP pump...

Page 63: ...MS unit operates regardless of the status of the STP control unit When the STP pump is the malfunction the TMS unit is stopped Operation 7 6 2 Temperature Control When the temperature of the STP pump...

Page 64: ...unit Version Execute Self Test Levitation State Breaker ON Acceleration State Normal Operation State Brake State Self test completed upper only Self test in progress upper only Stop Operation of the S...

Page 65: ...connector is M2 6 2 19 37 1 20 Operation REMOTE X7 Pin Arrangement Procure the connector for remote connection at your company 8 1 Input Signal Pins Use input signal pins according to Table 8 1 and F...

Page 66: ...e is used to start the STP pump open the circuits between 1 3 to stop the pump 1 22 COM RESET IN Pins for inputting the abnormality RESET signal Short the circuits between 1 22 for 0 3 seconds or more...

Page 67: ...ignal START STOP RESET INHIBIT 2 In case of Start 2 1 In case of Start 1 Figure 8 1 REMOTE X7 Input Signal Pins 1 pin 0V is insulated from the frame ground The input current of remote input signal is...

Page 68: ...ON state signal These pins are closed when the magnetic bearing functions and the rotor levitates This output is cut OFF at a power failure 10 29 ACCELERATION N O OUT Pins for outputting the ACCELERA...

Page 69: ...perature of the TMS unit is within the setting temperature range 10 C the pins between 17 16 are closed and the pins between 17 35 are opened If the TMS unit function is not valid the pins do not func...

Page 70: ...LERATION state signal output pins 12 13 32 33 15 14 REMOTE ACCELERTION NORMAL COM N C OUT NORMAL OPERATION state signal output pins BRAKE NO OUT ALARM COM N O OUT N O OUT N C OUT 16 17 35 26 AT TEMP C...

Page 71: ...r relays CR1 to 8 in Figure 8 2 Table 8 3 Rated Contacts for Relays CR1 to CR8 Resistance Load COS 1 Rated Load 125V AC 0 5A 24V DC 1A Rated Current 2A Maximum Contact Point Current 1A Maximum Open Cl...

Page 72: ...ach cable 2 Switch ON the breaker on the rear panel 3 After the STP pump completes the self test and enters the levitation state or the error message CAUTION Bad EEPROM content is displayed set MANUAL...

Page 73: ...ng are recorded in the STP pump and STP control unit When tuning after changing the configuration the STP pump serial number the STP control unit serial number the STP pump data overrides the STP cont...

Page 74: ...reaker ON CAUTION Bad EEPROM content Levitation Autotest Complete Software Version VER Tuning Tuning Complete Levitation State Press the RESET switch for about 5 sec Tuning Tuning Complete etc a statu...

Page 75: ...0 of the most recent errors Operation The emergency vent valve is not used with this series of STP pump Confirmation Method See Figure 9 2 1 Press the SELECT switch to enter Confirmation Mode The avai...

Page 76: ...OWN UP DOWN UP DOWN UP Next item DOWN Previous item SELECT Next group or When equipped with a TMS only When equipped with a TMS only NORM rpm SELECT SELECT SELECT SELECT SELECT SELECT Total hours of r...

Page 77: ...witch to display the next parameter and the DOWN switch to display the previous one 3 Press the ENTER switch to set the parameter to the new setting 4 Press the SELECT switch to display the next item...

Page 78: ...o go to next menu or ENTER to set to new parameter Press SELECT to go to next menu or ENTER to set to new parameter Select Remote Mode Rated Speed Setting TMS Function Setting INHIBIT Function Setting...

Page 79: ...odbus and LONWORKS only They are not displayed in I O Remote Mode UP DOWN Remote Mode Detail Settings To STORAGE Menu Press SELECT to go to next menu or ENTER to set to new parameter Press SELECT to g...

Page 80: ...o the alarm signal output is reset ii The STP control unit does not detect a power failure of less than approx 2 seconds continuing rotating the STP pump 2 When the rotational speed is less than appro...

Page 81: ...rpm LCD Message POWER lamp FAILURE lamp Power ON signal ALARM signal 8 000 or more Mains Failure OFF ON OFF ON Less than 8 000 OFF OFF OFF OFF OFF Table 10 2 Operations of the STP Pump after a Power R...

Page 82: ...ouch the touch down bearing due to external vibration impact intrusion of atmosphere or foreign materials into the STP pump or rotor imbalance the STP pump decelerates and stops The FAILURE lamp light...

Page 83: ...plays error message OVERSPEED 10 8 Abnormality Error in the TMS Unit for Use with the TMS Unit 1 Abnormality Error in the TMS Unit i If the temperature of the STP pump base unit is 10 C higher or 10 C...

Page 84: ...ion Cable and Connectors When an abnormality error occurs in the TMS connection cable the STP pump decelerates and stops Output of the heater and the cooling water unit is OFF The FAILURE lamp lights...

Page 85: ...Abnormal magnetic bearing Rotor descends onto the touch down bearing FAILURE Disturbance _ ALARM The STP pump stops STP connection cable breakage STP connection cable disconnection Abnormal control ci...

Page 86: ...vacuum equipment or piping Continuous repetition of startup stop Extraordinarily high temperature Possible CAUTION CNT heat The STP pump does not stop Overheating inside the STP control unit Temperat...

Page 87: ...ates and stops Output of heater and cooling water valve is OFF Abnormal cooling water Heater disconnect Possible Failure of TMS unit TMS heater overheats FAILURE TMS Overheat ALARM The STP pump decele...

Page 88: ...wer Failure Establish a sequence so that the power can be supplied to the STP control unit immediately after a power recovery 11 1 2 Troubleshooting Other Abnormality Error Troubleshooting Refer to Se...

Page 89: ...ll display the contents of the next or previous error message The UP or DOWN switch can also be input in Remote Mode Example Press DOWN Switch BRAKE 00rpm Error n 1 3 BRAKE 00rpm Error n 2 3 Press UP...

Page 90: ...g turning 2 Use of different version of the software 3 Failure of the STP pump or the STP control unit 1 Perform turning again Reconfigure the initialized settings 2 Perform tuning 3 Contact Service o...

Page 91: ...STP control unit Contact Service office Malfunction information DRIVER com Failure Failure of the STP control unit Contact Service office Malfunction information DSP PCB com fail Failure of the STP co...

Page 92: ...g inside the STP pump 1 Overheating during baking 2 Insufficient cooling 3 Leakage of the vacuum piping system 4 Repetitious start stop operations 1 Set the temperature of the baking heater to 120 C o...

Page 93: ...t of the damage on the touch down bearing exceeds the second damage limit and the start is not allowed Overhaul is needed Contact Service office Malfunction information Speed Pulse Lost Failure of the...

Page 94: ...unit becomes 10 C or less such error cannot be detected within 1 hour after startup 1 Failure of the TMS heater 2 Failure of the TMS unit 1 Contact Service office 2 Contact Service office Malfunction...

Page 95: ...ccurred 10 1 11 3 2 Abnormalities When Performing the STP Pump Start Operation When the FAILURE lamp lights and the LCD displays an error message see Section 11 2 When Error Message is Displayed on LC...

Page 96: ...gases remain inside the STP pump contact Service office when it is needed to be cleaned 5 3 11 8 3 2 The STP pump stops ROTATION INHIBIT signal input pins REMOTE X7 1 5 are opened When not using this...

Page 97: ...e WARNING message cannot be reset by the RESET switch Service office is in charge of resetting the WARNING message The STP pump can operate even when the WARNING message is displayed It is recommended...

Page 98: ...the error record push the SELECT switch follow the instructions for entering Confirmation Mode in Section 9 The error number of up to the last 10 errors is displayed on the upper line of the LCD in t...

Page 99: ...ng maintenance and inspections of the STP pump and STP control unit Failure to do so may result in the inadvertent rotation of the STP pump which may result in an accident Do not touch any place other...

Page 100: ...Interior The decontamination overhaul in the STP pump is executed in Service office When overhaul is needed contact Service office Exterior Wipe with proper solvent such as alcohol When dust has accum...

Page 101: ...me extent an overhaul cleaning is required Contact Service office Note that the costs of troubleshooting problems resulting from deposit will be at your own charge even during the warranty period If a...

Page 102: ...process 2 years Processes resulting in accumulation of deposits in the pump will require more frequent service Clean applications Only vacuum pumping 5 years Other use 2 years Dependent on application...

Page 103: ...re returning the STP pump for repairs overhaul or other purposes To avoid any accident by gases or corrosion inside the STP pump particularly when corrosive reactive or flammable gases have been used...

Page 104: ...re are corrosive gases Place subjected to dripping water Place with a lot of dust Place with insufficient ventilation Place subjected to strong magnetic or electric fields Place subjected to radiation...

Page 105: ...de the STP pump thoroughly Residual gases may result in an accident when disposing of the STP pump If the STP pump has been used with reactive or corrosive gasses always clean thoroughly before dispos...

Page 106: ...ted speed rpm 32 500 Starting time min 7 Stopping time min 8 Noise dB 50 at 32 500 rpm Baking temperature C 120 Lubricating oil Not necessary Installation position Free Cooling method Water cooling St...

Page 107: ...onnector Optional accessory Bending dimensions of the STP connection cable A Figure 13 1 External Appearance of the STP Pump STP H803 Series 165 170 1 8 0 157 147 5 3 0 3 0 2 0 2 5 4 5 2 1 0 Outlet po...

Page 108: ...Screw hole for leg 8 M12 1 Depth 24 Purge port KF 1 10 1 JIS 2 Conform to ISO Unit mm STP connector Inlet port flange ISO200F 180 35 15 27 2 6 0 2 7 0 15 2 2 5 87 37 8 9 300 285 237 270 16 208 262 304...

Page 109: ...SERIAL NO MANUFACTURING DATE WEIGHT kg RATED SPEED rpm MANUFACTURED BY BOC Edwards Technologies Ltd Narashino Japan Manufactured by BOC Edwards at the former Seiko Seiki plant in Narashino Japan STP C...

Page 110: ...z 542 Ambient temperature range C 0 to 40 Storage temperature range C 25 to 55 Mass 1 kg 9 Dimensions mm W210 H132 5 D401 6 TMS control unit Internal Operation switches START switch flat panel switch...

Page 111: ...OTE X7 37 pins Input output cables Power primary cable STP connection cable TMS connection cable optional accessory Safety functions Magnetic bearing abnormality error detection STP pump overheat dete...

Page 112: ...STP H803 H1303 Series Instruction Manual Figure 13 4 External Appearance of the STP Control Unit 13 7...

Page 113: ...SCU MANUFACTURING DATE POWER CONSUMPTION POWER SUPPLY 50 60Hz 1 AC WEIGHT kg V VA Manufactured by BOC Edwards at the former Seiko Seiki plant in Narashino Japan MANUFACTURED BY BOC Edwards Tecnologies...

Page 114: ...inch 1 100 1 00x10 3 39 4 0 01 1 10 0 0 394 1x10 3 0 10 1 39 4x10 3 25 4x10 3 2 54 25 4 1 Weight g kg lb 1 1 00x10 3 2 20x10 3 1x10 3 1 2 20 454 0 454 1 Pressure Pa Torr kgf cm 2 1 7 50x10 3 1 02x10...

Page 115: ...facture BOC Edwards Japan Limited 2 4 1 Shibakoen Minato ku Tokyo 105 0011 JAPAN Telephone Domestic 03 5470 6530 International 81 3 5470 6530 Facsimile Domestic 03 5470 6521 International 81 3 5470 65...

Page 116: ...e STP H803 H1303 Series and the STP H803C1 For the Safety Precautions installation operation and maintenance read the STP H803 H1303 Series Instruction Manual Keep this Manual in a place where you can...

Page 117: ...hemical specific 1 For the specifications of other models of the STP H803C1 pump contact BOC Edwards In this manual the above STP pump series is collectively referred to as the STP pump This Manual pi...

Page 118: ...TABLE OF CONTENTS 1 Specifications 1 1 1 1 Specifications for the STP Pump 1 1 1 2 Specifications for the STP Control Unit 1 2 TABLES Table 1 1 Specifications for the STP Pump 1 1 Table 1 2 Specifica...

Page 119: ...ime min 8 Noise dB 50 at 34 500 rpm Baking temperature C 120 Lubricating oil Not necessary Installation position Free Cooling method Water cooling Standard backing pump L min 1 300 Mass 3 kg 39 Dimens...

Page 120: ...temperature range C 25 to 55 Mass 2 kg 9 Dimensions mm W210 H132 5 D401 6 TMS control unit Internal Operation switches START switch flat panel switch green STOP switch flat panel switch dark gray RES...

Page 121: ...pins REMOTE X7 37 pins Input output cables Power primary cable STP connection cable TMS connection cable optional accessory Safety functions Magnetic bearing abnormality error detection STP pump over...

Page 122: ...facture BOC Edwards Japan Limited 2 4 1 Shibakoen Minato ku Tokyo 105 0011 JAPAN Telephone Domestic 03 5470 6530 International 81 3 5470 6530 Facsimile Domestic 03 5470 6521 International 81 3 5470 65...

Page 123: ...hazardous materials Note Some contaminated equipment may not be suitable for airfreight PROCEDURE 1 Contact BOC Edwards and obtain a Return Authorisation Number for your equipment 2 Complete the Retur...

Page 124: ...roof of decontamination YOU MUST CONTACT BOC EDWARDS FOR ADVICE BEFORE YOU RETURN SUCH EQUIPMENT Print your name _________________________________Print your job title _________________________ Print y...

Page 125: ...C EDWARDS Ammerthalstra e 36 85551 Kirchheim Munich Tel 49 89 99 19 18 0 Fax 49 89 99 19 18 99 HONG KONG S A R BOC EDWARDS ASIA 12 Chun Yat Street Tseung Kwan O Industrial Estate Tseung Kwan O Kowloon...

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