STP-H803/H1303 Series Instruction Manual
TABLE OF CONTENTS
SAFETY PRECAUTION
INTRODUCTION
APPLIED STANDARDS
PRECAUTIONS
REQUEST
LIMITED WARRANTY
1 Precautions for Safe Operation of the STP Pump...............................................1-1
1.1 Usable
Gases ..................................................................................................................... 1-1
1.2
Maintenance and Inspection Precautions........................................................................... 1-1
1.3 Labels.................................................................................................................................. 1-2
2 Operation
Principle
of the STP Pump .................................................................2-1
3 Unpacking ...........................................................................................................3-1
3.1
Unpacking the STP Pump and the STP Control Unit ......................................................... 3-1
3.2 Accessories......................................................................................................................... 3-2
4 Installation
of
the STP Pump...............................................................................4-1
4.1
Name and Function of Each Part........................................................................................ 4-1
4.2 Precautions
Before Installation ........................................................................................... 4-3
4.2.1 Operating
Environment.......................................................................................... 4-3
4.2.2 Installation Area ..................................................................................................... 4-4
4.2.3 Bench ..................................................................................................................... 4-4
4.3
How to Install the STP Pump .............................................................................................. 4-6
4.3.1 Cleaning
the Seal................................................................................................... 4-7
4.3.2 STP Pump Installation Positions............................................................................ 4-8
4.3.3 How to Secure the STP Pump............................................................................... 4-9
4.3.4 Vacuum
Piping..................................................................................................... 4-13
4.3.5 Connecting
the
Purge Port .................................................................................. 4-15
5 Gas Pumping, Cooling and Baking the STP Pump .............................................5-1
5.1 Gas
Pumping ...................................................................................................................... 5-1
5.1.1 How to Introduce a Purge Gas .............................................................................. 5-1
5.2 Cooling
the STP Pump ....................................................................................................... 5-2
5.2.1 Water
Cooling Method ........................................................................................... 5-2
5.3 Baking
the STP Pump......................................................................................................... 5-3
5.3.1 Attaching
a
Baking Heater ..................................................................................... 5-3
6 Installation of the STP Control Unit .....................................................................6-1
6.1
Name and Function of Each Part........................................................................................ 6-1
6.1.1 Front Panel ............................................................................................................ 6-1
6.1.2 Rear Panel ............................................................................................................. 6-4
6.2 Precautions
Before Installation ........................................................................................... 6-5
6.2.1 Operating
Environment.......................................................................................... 6-5
6.2.2 Insulation Test........................................................................................................ 6-5
6.2.3 Installation Area ..................................................................................................... 6-7
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