STP-H803/H1303 Series Instruction Manual
Table 10.3
Safety Functions (2/2)
Abnorm
ality
/Error
Operation
state of
safety functions
Lamp
indication
LCD
REMOTE
output signal
State of the ST
P
pum
p
Probable causes of an
abnormality/error
Reset by
RESET
switch
Overheating
inside the
STP pump
T
em
perature of
the
STP pump
motor rises.
"FAILURE"
"MOTOR Overheat"
"ALARM"
The
STP pump de
ce
le
rate
s
and stops.
Abnormal baking
tem
perature.
Insufficient cooling.
Leakage of vacuum
equipm
ent or piping.
Continuous repetition of
startup/stop.
Extraordinarily-high
tem
perature.
Possible
"CAUTION: CNT
heat*"
The
STP pump do
es
no
t
stop.
Overheating
inside the
STP control
unit
T
em
perature
inside
the
STP
control unit rises.
"FAILURE"
"CNT
Overheat*"
"AL
ARM"
The
STP pump de
ce
le
rate
s
and stops.
Failure in the cooling fan.
Shielding of cooling air
inlet and ventilation port.
Extraordinarily-high
tem
perature.
Possible
Overspeed
Rotational speed
of the ST
P
pum
p
over the specified
speed.
"FAILURE"
"OVERSPEED*"
"ALARM"
"POWER ON"
output
cut-off
Bre
ake
r OFF.
Power failure state is
entered and the STP
pump stops.
Failure in the m
otor driver.
Impossible
10-7
