STP-H803/H1303 Series Instruction Manual
6.3
Attaching the STP Control Unit to a Rack........................................................................... 6-8
6.4 Cable
Connection ............................................................................................................... 6-9
6.4.1 Name and Dimensions of Each Cable................................................................... 6-9
6.4.2 How to Connect the Cables ................................................................................. 6-12
6.5
Connecting to Semiconductor Equipment ........................................................................ 6-14
6.5.1 Connecting
to Power............................................................................................ 6-14
6.5.2 Emergency Off Circuit (EMO Circuit)................................................................... 6-14
7 How to Start/Stop the STP Pump........................................................................7-1
7.1 Before
Starting .................................................................................................................... 7-1
7.2 Start
Procedures ................................................................................................................. 7-2
7.3 Stop
Procedures ................................................................................................................. 7-2
7.4 Manual
Operation ............................................................................................................... 7-3
7.4.1 Powering ON.......................................................................................................... 7-3
7.4.2 Starting
the STP Pump .......................................................................................... 7-3
7.4.3 Stopping
the
STP Pump ........................................................................................ 7-4
7.4.4 Starting the STP Pump after Stopping................................................................... 7-4
7.4.5 Powering OFF........................................................................................................ 7-4
7.4.6 Starting the STP Pump after a Safety Function Operates..................................... 7-4
7.5 Remote
Operation............................................................................................................... 7-5
7.5.1 Powering ON.......................................................................................................... 7-5
7.5.2 Starting/Stopping
the STP Pump........................................................................... 7-5
7.5.3 Starting the STP Pump after Stopping................................................................... 7-6
7.5.4 Powering OFF........................................................................................................ 7-6
7.5.5 Starting the STP Pump after a Safety Function Operates..................................... 7-6
7.6
Operating the TMS Unit (For use with the TMS unit only).................................................. 7-7
7.6.1 Starting/Stopping ................................................................................................... 7-7
7.6.2 Temperature Control.............................................................................................. 7-7
8 Remote
Input/Output
Signal Connector ..............................................................8-1
8.1 Input
Signal Pins ................................................................................................................. 8-1
8.2 Output
Signal Pins .............................................................................................................. 8-4
9 Adjustment
Methods ...........................................................................................9-1
9.1 Tuning ................................................................................................................................. 9-1
9.1.1 Tuning
Method ....................................................................................................... 9-1
9.1.2 Each of data after tuning........................................................................................ 9-2
9.2 Confirmation Mode.............................................................................................................. 9-4
9.3 Parameter Set Mode........................................................................................................... 9-6
10 Safety Functions ...............................................................................................10-1
10.1 Power
Failure.................................................................................................................... 10-1
10.2 Abnormal State of Magnetic Bearing ................................................................................ 10-3
10.3 Excessive
Vibration........................................................................................................... 10-3
10.4 Motor
Driver Overload....................................................................................................... 10-3
10.5 Overheating
Inside
the STP Pump ................................................................................... 10-3
10.6 Overheating Inside the STP Control Unit.......................................................................... 10-4
10.7 Overspeed......................................................................................................................... 10-4
10.8 Abnormality/Error in the TMS Unit (for Use with the TMS Unit) ....................................... 10-4
11 Troubleshooting, Maintenance, and Inspection.................................................11-1
11.1 Troubleshooting Immediately after an Abnormality/Error Occurs..................................... 11-1
11.1.1 Troubleshooting Power Failure............................................................................ 11-1
11.1.2 Troubleshooting Other Abnormality/Error............................................................ 11-1
11.2 When Error Message is Displayed on LCD ...................................................................... 11-2
11.2.1 Error Messages.................................................................................................... 11-2
11.3 Other
Abnormalities .......................................................................................................... 11-8
11
