STP-H803/H1303 Series Instruction Manual
1
Precautions for Safe Operation of the STP Pump
Installation
1.1 Usable
Gases
The STP series models are chemical specific pumps: chlorine or fluorine system
gases can be used. When you use gases including alkaline metals, but excluding
Li, gases including Ga, Hg, In, or Sn, or HBr, contact BOC Edwards.
◇
To prevent an accident, confirm the characteristics of gases to be
used, referring to the Material Safety Data Sheet (MSDS) you obtain
from the gas supplier.
And, keep MSDS and a safety advice of gas supplier.
CAUTION
◇
Introduce a dry N
2
gas (purge gas) to protect the inside of the STP
pump when using reactive or corrosive. The use of reactive or
corrosive gas may result in product damage.
◇
Cool the STP pump to prevent the STP pump from overheating when
pumping gases.
1.2
Maintenance and Inspection Precautions
Perform any maintenance or inspection of the STP pump and the STP control
unit, following Section 11, "Troubleshooting, Maintenance and Inspection."
1-1
