4. Installation
4-5 Fitting sensors
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4-5 Fitting sensors
4-5-1 Configuration of the main unit
CAUTION
Each unit is composed of precision components. In particular, be careful to avoid dropping the
sensors when removing them. Dropping or exposing to strong impact can cause sensors or units to
malfunction. Dropping or exposing to strong impact may also impair sensor performance.
Pump unit
Flow sensor unit
Sensor
Chamber unit
Fan unit
Summary of Contents for GD-84D-EX Series
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