Rigaku MFM65S2RFFFLFL Instruction Manual Download Page 93

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ME12058B

Operation Section

Summary of Contents for MFM65S2RFFFLFL

Page 1: ...Metal Film Monitor MFM65 Model MFM65S2RFFFLFL Instruction Manual 1 Operation Section Manual No ME12058B02 Rigaku Corporation...

Page 2: ...3 1033 Fax 1 281 364 3628 URL http www Rigaku com JAPAN Rigaku Corporation Semiconductor Instruments Division 3 9 12 Matsubara cho Akishima shi Tokyo 196 8666 JAPAN Tel 81 42 545 8102 Fax 81 42 54 031...

Page 3: ...ath This indication is used very limitedly and it must be strictly observed b WARNING In the case of mishandling an operator may be killed or suffer a serious injury It is also used to denote an actio...

Page 4: ...Software 24 4 4 Equipment Initialization and Aging 26 4 5 Equipment Diagnosis 28 5 SHUTDOWN 29 5 1 Unload Sample 29 5 2 Deactivate the Equipment 30 5 3 Sample Unloading in the Event of Emergency 33 6...

Page 5: ...2 1 Training for Using Equipment 60 APPENDIX 3 61 A3 1 Power Circuit Diagram 61 APPENDIX 4 63 A4 1 List of Material Safety Database Sheet MSDS 63 A4 2 MSDS of Beryllium 64 A4 3 MSDS of Lead 75 A4 4 MS...

Page 6: ...ayer films by the X ray fluorescence XRF in addition to measuring film thickness by the X ray reflectometry XRR This equipment can be used in clean rooms and meets a wide array of needs ranging from c...

Page 7: ...arning labels affixed on the enclosure of this system The border of the radiation controlled area is defined at the outside surface of the enclosure The dose equivalent limit at the border of the radi...

Page 8: ...stem 5 Material Hazards NOTE The MFM65 system has no material hazards in the daily operation Pay attention to the warning labels to be affixed on the enclosure of this system 6 Fire Hazards WARNING Pl...

Page 9: ...ray Hazard X ray Hazard Exposure to harmful overriding safety interlock Please observe appropriate safety guidelines Access should be limited to authorized personnel only radiation possible by 2 X ra...

Page 10: ...SURFACE INSIDE Contact may result in severe burns Open only after safe temperature is reached SF016 2C Fig 2 2 2 Hazard Labels 2 7 Material Hazard Material Hazard Mercury Skin contact may be hazardou...

Page 11: ...6 ME12058B Operation Section The location of the hazard indication labels is the following figure Fig 2 2 3 Location of Hazard Indication Labels...

Page 12: ...ront View Left View Right View Fig 2 2 4 Signal Towers and Buzzers Maintenance Buzzer Maintenance Lamp X ray ON Lamp 1 X ray ON Lamp 2 X ray ON Lamp 3 EMO Maintenance Buzzer Maintenance Lamp X ray ON...

Page 13: ...c shock 9 9 9 9 9 9 9 9 9 9 9 7 Electric protection panel at the X ray power supply Electric shock 9 9 9 9 9 9 9 9 9 9 9 8 Electric protection panel in the lower of Power Box Electric shock 9 9 9 9 9...

Page 14: ...r of Power Box 9 Water leak sensor 10 Rear side Door of Main module 11 Right side Door of EFEM Right side Door of EFEM Gate and Cover at wafer aligner closed 12 Left side Door of EFEM Left side Door o...

Page 15: ...ut handle 1 Pull down the lock out handle 2 Set the tag to the lock out handle 3 Lock the tag 2 The cooling water lock out 1 Open the lower panel on the left side 2 Remove the internal cover 3 Close t...

Page 16: ...ushed electric power is OFF immediately See 2 3 Interlock List Push this button when an accidental event occurs for example loss of mechanical control water leakage or fire The MFM65 system has four E...

Page 17: ...is key must be in safe keeping with the maintenance personnel in charge and only maintenance service personnel can use these keys for maintenance only Another is the key for X ray maintenance This key...

Page 18: ...nce Panel for Main Module Maintenance Door for Main Module Maintenance Door for EFEM FFU EMO Power Cable Inlet Power ON OFF Buttons Main Breaker Inside Maintenance panels EMO Utility connections Front...

Page 19: ...14 ME12058B Operation Section Goniometer Figure Fig 3 1 2 Gonimeter...

Page 20: ...15 ME12058B Operation Section EFEM Figure Fig 3 1 4 EFEM Figure Wafer Robot Wafer Aligner Load Port Top View...

Page 21: ...controller C P U Motor goniometer DS RS SD APD SC Limit switches alarm lamps gates etc Main module EFEM RS232C Water Chiller XG1 XRF XG2 XRR AF SDD MCA AF controller XG3 Option CID Carrier ID Control...

Page 22: ...F incident angle control up to 0 to 15 degrees up to 40 degrees if the distance between the SDD and the sample is aligned X ray source For XRR XRD XRF Cu target sealed tube 25 W 1 corner CMF mirror Au...

Page 23: ...er Map Pattern Map Data Log Equipment Log Process Log Alarm Setup EFEM Settings Optics Setup System Setup Startup Startup Shutdown Alarms Alarm Alarm Log Accessory off line analysis software 1 GXRR XR...

Page 24: ...ti layer mirror unit X ray beam size 85 m Alignment mechanism Fine adjustment with screws manual operation Divergence slit DS One dimensional automatic variable slit 0 01 to 3 mm 0 005 mm step Inciden...

Page 25: ...p Sub axis in plane rotation 5 degrees 0 0001 degree step X axis left right 0 to 150 mm 0 0002 mm step Y axis front back 150 to 150 mm 0 0002 mm step Pattern Recognition Unit Positioning accuracy X 2...

Page 26: ...s recipes for the mapping of points on non patterned wafers Recipes Pattern Map Creates and edits recipes for the mapping of points on patterned wafers Displays recent LOGs Equipment Log Displays the...

Page 27: ...equipment 3 Start up the control software 4 Initialization and aging 5 Equipment diagnosis 4 1 Preparation of the Water Chiller Open the cooling water valves on the primary side Power on the water chi...

Page 28: ...equence 1 Main breaker lock out handle ON 2 Push the POWER ON button Button indicator lamp is ON 3 Push the X RAY button Button indicator lamp is ON 4 Push the ROBOT button Button indicator lamp is ON...

Page 29: ...gainst the keyboard table 2 Windows starts up 3 Log into Windows 4 Double click on the MFM65 icon to start up the control software 5 Log into the control software and the MFM65 control software starts...

Page 30: ...25 ME12058B Operation Section Fig 4 3 2 Main Window of Control Software These four buttons are available for administrator When login to a general user account these buttons disappear...

Page 31: ...Datalog and Setup buttons are available for administrator When login to a general user account these buttons disappear 2 Initialize the equipment Click on Startup among the sub sub navigation buttons...

Page 32: ...tube 1 is carried out When XG for Optics 2 is selected aging of the X ray tube 2 is carried out When XG for Optics 3 is selected aging of the X ray tube 3 is carried out Startup Initialize the goniome...

Page 33: ...e is 0 01 or smaller XRR beam position 2 angle shifts by more than 0 01 degree Measure the check sample If the obtained film thickness differs from the standard value the optic system will require ali...

Page 34: ...e the goniometer Controlled by the shutdown program Start NOTE Make sure the measured wafer the wafer or the cassette that is untreated due to the emergency stop are not left in the equipment for the...

Page 35: ...pment Fig 5 2 1 Navigation Button NOTE System Recipes Setup DataLog and Setup buttons are available for administrator When login by a general user account these buttons disappear Click on Jobs Shutdow...

Page 36: ...l program 4 Shut down the PC 5 Push the POWER OFF button 6 Pull down the main breaker lock out handle of the main module and the water chiller Refer to 2 4 Lock out Tag out 7 Close the manual valve on...

Page 37: ...32 ME12058B Operation Section Fig 5 2 5 Power Switch 5 6...

Page 38: ...oved in the normal ways follow the steps specified below 1 Sample unload Click on the Sampler Unload button to remove the wafer from the equipment When the Wafer Control dialog is displayed make sure...

Page 39: ...nto the transport arm The carrier is undocked Confirm the green Load lamp on after removing the FOUP carrier from the load port If the Load lamp is not on execute Startup again without putting the FOU...

Page 40: ...rtup command See 6 1 2 Check the X ray intensity and angular positions by beam diagnosis See 6 2 3 Measure the check sample See 6 3 Others 4 Check for unusual noise or odor 6 1 Initialization Execute...

Page 41: ...36 ME12058B Operation Section NOTE If an error occurred in the startup procedure see 9 Trouble Shooting And then contact to the maintenance personnel Fig 6 1 1 Startup Display...

Page 42: ...nfirmation dialog box appears Click on OK the beam position is saved in the XRR and XRF setup data of Setup and is added to Diagsis log of the equipment Make sure the beam intensity error and angle po...

Page 43: ...s analyze the predetermined reference sample and check the repeatability of the analysis results Use the predetermined job and recipe to analyze the sample See 7 Daily Analysis NOTE Please ask how to...

Page 44: ...collision of transport mechanism will occur Be sure to confirm the wafer size prior to measurement 1 Confirm the wafer size 2 Set the wafer cassette on the Load Port 1 2 3 Set the Process Recipe 4 Sta...

Page 45: ...Install a FOUP carrier to the loadport 3 Push OP ACCESS button after confirming that the PRESENCE PLACEMENT and OP ACCESS lamps are on 4 The FOUP carrier is docked and the map figure is displayed on t...

Page 46: ...41 ME12058B Operation Section 7 3 Set theCreate Jobs List 1 Select Jobs Create Jobs to display the job list Fig 7 3 1 Job List...

Page 47: ...e Job list cannot be edited Port Load Port number Slot Number of the slot holding a wafer Set the slot numbers between 1 25 from the bottom Process Recipe Select the Process Recipe Wafer ID Name of th...

Page 48: ...turn light yellow and Control Job is finished is displayed in the title screen The status lamp of the signal tower then turns yellow and blinks as it waits for an operator command If V automatic carri...

Page 49: ...adjusting the suction pressure of vacuum 9 4 Cleaning of the transport line 9 5 Checking the suction pressure of the transport robot 9 6 Exchange of cooling water and filters 9 7 Exchange of X ray tub...

Page 50: ...oling water hoses from the inlet connector to the outlet connector If water leakage is detected repair leaks wipe leaked water and turn on the Start button again Check to make sure that the EMO button...

Page 51: ...t the side doors of the main module or EFEM are not open See 2 3 Interlock List Check to make sure that the load port panels or rear panels are not open Opening any of these panels or doors turns off...

Page 52: ...re screen does not shows a CW alarm even though the water chiller is operating and circulating cooling water For the CW alarm adjust the flow rate so that the alarms are cancelled Check to make sure t...

Page 53: ...the direct beam position is different the X ray optics may be out of adjustment NOTE Contact our service personnel in charge for readjustment of the X ray optics NOTE Contact our service personnel in...

Page 54: ...ment it is moved to the robot home position Conduct the wafer ejection operation Unload Carrier If there is no wafer in the equipment conduct the carrier ejection operation Unload Carrier If the softw...

Page 55: ...duct the startup procedure with the software When the wafer is moved to the robot home position click Unload Wafer on the main window of the software Refer to 5 3 Sample Unloading in the Event Emergen...

Page 56: ...at the alignment condition Check to make sure that the curvature of the sample is not too large Check to make sure that the slit setting in the recipe NOTE Contact the maintenance personnel for checki...

Page 57: ...allowing the observation of oscillations according to film thickness The critical angle cannot be fitted Check to make sure that the curvature of the sample is not too large If the curvature of the sa...

Page 58: ...uring the standard sample the data of the standard sample cannot be loaded to the XRF software of creating the calibration curve When measuring the standard sample enter _C strings to the comment colu...

Page 59: ...tor Close the door and panels and restart Check to make sure that the water chiller has not shut down If the water chiller does not supply the required amount of cooling water the X ray generation sto...

Page 60: ...r non crystalline materials provided that the surface or interface is smooth In particular XRR has attracted attention as a method capable of estimating the thickness density and surface interface rou...

Page 61: ...n of the XRR profile 10 5 10 4 10 3 10 2 10 1 10 0 Refle ct iv ity 8 6 4 2 0 2 degree Attenuation rate of intensity at large angles Surface roughness Attenuation rate of oscillation at large angles Ro...

Page 62: ...can be improved through fitting analysis Analysis of film thickness density and roughness fitting Analysis is relatively easy as there are few parameters Analysis of film thickness density and roughne...

Page 63: ...ch aligner Move sample stage to the wafer pickup position Open lid Place wafer on the sample stage 1 Close lid Load Unload Press a button 1 Alignment of sample height Angle alignment Measurement Analy...

Page 64: ...sition Open lid Unload wafer Return to the load port Operator call Yellow lamp blinks End A B Yes No Load Unload Press a button Open load port door Unload carrier Close load port door Analysis for all...

Page 65: ...Daily checks Engineers Above programs designed for operators Method of producing recipe for XRR measurement Method of producing recipe for XRF measurement Method of producing recipe for XRF measureme...

Page 66: ...61 ME12058B Operation Section APPENDIX 3 A3 1 Power Circuit Diagram Fig A3 1 1 Power Circuit Diagram 1...

Page 67: ...62 ME12058B Operation Section Fig A3 1 2 Power Circuit Diagram 2...

Page 68: ...lium 7440 41 7 Vacuum seal for X ray window Air seal for detector window X ray tube X ray detector APD X ray detector SDD Lithium 12190 79 3 Built in Battery PC Hour meter Mercury 7439 97 6 Discharge...

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Page 102: ...pecifications Subject to Change without Notice Rigaku Corporation Tokyo Branch 4 14 4 Sendagaya Shibuya ku Tokyo 151 0051 Japan Phone 81 3 3479 0618 Fax 81 3 3479 6112 e mail rinttyo rigaku co jp Riga...

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