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ME12058B
Operation Section
APPENDIX 2
A2.1 Training for Using Equipment
(1)
Training for Operation
We provide the explanation of equipment operating procedures shown in the table below at the
time of equipment delivery.
Please discuss the schedule and contents of this training with our service personnel in charge.
We can also provide additional explanation of equipment operation, if necessary. Regarding
operation training, contact our service personnel in charge or our company.
Target
personnel
Examples of training contents
Operators
* Equipment power ON
* Equipment startup procedure
* XRR measurement using recipe
* XRF measurement using recipe
* Optional measurement (XRD, PORE size measurement) using recipe
* Equipment shutdown
* Daily checks
Engineers
* Above programs designed for operators
* Method of producing recipe for XRR measurement
* Method of producing recipe for XRF measurement
* Method of producing recipe for XRF measurement
* Method of producing recipe for optional measurement (XRD,PORE size
measurement)
* Periodic checks
(2)
Training for Maintenance
We provide the explanation of equipment maintenance for your engineers at the time of equipment
delivery.
This training can be provided together with the above operation training. Please discuss the
schedule and contents of this training with our service personnel in charge.
We can also provide additional explanation of equipment maintenance, if necessary. Regarding
maintenance training, contact our service personnel in charge or our company.
Examples of training contents
* Configuration of equipment hardware
* Explanation of interlock
* Troubleshooting
* Explanation of consumables and maintenance parts
Summary of Contents for MFM65S2RFFFLFL
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