Rigaku MFM65S2RFFFLFL, Instruction Manual

Page: 49 / 102

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44
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ME12058B
Operation Section
8. ROUTINE CHECKUP LIST
Cycle
Items
Day Week Month 6months Year Others
1
Cooling water:
Checking and adjusting
the flow rate of
secondary-water flow
rate
9
2
Compressed dry air:
Checking and adjusting
of the pressure of
compressed dry air
9
3
Vacuum:
Checking and adjusting
the suction pressure of
vacuum
9
4
Cleaning of the transport
line
9
5
Checking the suction
pressure of the transport
robot
9
6
Exchange of cooling
water and filters
9
7
Exchange of X-ray tubes 5000H –
8000H
8
Check for the operation
of the water leak sensor
9
9
Add mechanical grease
9
NOTE :
The maintenance personnel should check the routine checkup of the above table.
Contact to the maintenance personnel and refer to the maintenance manual about the
contents of the routine checkup.