Rigaku MFM65S2RFFFLFL, Instruction Manual

Page: 39 / 102

−
34
−
ME12058B
Operation Section
(2) Carrier Unload
Click on the
[Carrier Unload]
button; the carrier is undocked.
(3) If the Sample Unload or Carrier Unload button is inoperable, follow the steps specified
below to unload it.
① Click on
[Jobs]
–
[Startup]
.
②
If the above button is also inoperable, click on
[Jobs]
–
[Terminate FMF]
or click on the
X
button at the upper right of the window to deactivate the program. Then, restart the program to
activate the
[Jobs]
–
[Startup]
button.
③ When the
[Startup]
command is executed, the wafer, if any, is unloaded onto the transport
arm. The carrier is undocked.
④ Confirm the green
[Load]
lamp on after removing the FOUP carrier from the load port.
⑤ If the
[Load]
lamp is not on, execute
[Startup]
again without putting the FOUP carrier to the
load port. The load port is initialized and
[Load]
lamp is on.
⑥ Push the
[OP-ACCESS]
button to dock the FOUP carrier, and then click on
[Sample unload]
to unload a wafer. At this time, confirm that the destination slot of the carrier is empty.
⑦ Click on
[Carrier Unload]
to undock the carrier, and remove the carrier from the equipment.
By following the above steps, the equipment is returned to its initial state.
NOTE : Otherwise, the carrier can be removed by turning off the main power.
Fig. 5-3-3 Carrier Unload Button