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43
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ME12058B
Operation Section
7.4 Start Measurement
Click on
[Start Job]
.
The steps are executed from the create job list sequentially for measurement purposes.
The status lamp of the signal tower turns green during the measurement.
7.5 End Analysis
Upon completion of measurement, all of the job-list lines turn light yellow and
[Control Job is
finished.]
is displayed in the title screen.
The status lamp of the signal tower then turns yellow and blinks as it waits for an operator command.
If
V
automatic carrier unloading is selected, the carrier is unloaded.
7.6 Unload the Cassette
(1) Confirm that the
[UNLOAD]
and
[OP-ACCESS]
lamps are ON.
(2)
Push
[OP-ACCESS]
button to undock the FOUP carrier.
(3)
Remove the FOUP carrier from the loadport.
(4)
[LOAD]
lamp becomes on, and next FOUP cassette can be loaded.
Fig. 7-4-1 START Button
Summary of Contents for MFM65S2RFFFLFL
Page 19: ...14 ME12058B Operation Section Goniometer Figure Fig 3 1 2 Gonimeter...
Page 37: ...32 ME12058B Operation Section Fig 5 2 5 Power Switch 5 6...
Page 67: ...62 ME12058B Operation Section Fig A3 1 2 Power Circuit Diagram 2...
Page 69: ...64 ME12058B Operation Section A4 2 MSDS of Beryllium...
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Page 80: ...75 ME12058B Operation Section A4 3 MSDS of Lead...
Page 81: ...76 ME12058B Operation Section A4 4 MSDS of Lithium...
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Page 84: ...79 ME12058B Operation Section A4 5 MSDS of Mercury...
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