Rigaku MFM65S2RFFFLFL, Instruction Manual

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45
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ME12058B
Operation Section
9. TROUBLE SHOOTING
9.1 Electric Power
Troubles Causes and remedies
The Start button does not
operate.
Check to make sure that the circuit breaker of the power box
on the facility side is turned on, and power is supplied to the
equipment.
The Start button turns off
during equipment operation.
Check to make sure that the water leak detector has not
activated.
Check the cooling water hoses from the inlet connector to the
outlet connector.
If water leakage is detected, repair leaks, wipe leaked water,
and turn on the Start button again.
Check to make sure that the EMO buttons are not pressed in.
(See “2.5 EMO”.)
If the EMO button is activated, rotate the EMO buttons to set
them in the extended position.
Check to make sure that the interlock panels are not left open.
(See “2.3 Interlock List”.)
NOTE:
Contact the maintenance personnel.
CAUTION
When checking the water leak detector,
contact the maintenance personnel.
CAUTION
When checking the power box, contact the
maintenance personnel.