−
33
−
ME12058B
Operation Section
5.3 Sample Unloading in the Event of Emergency
If a wafer or carrier is left in the equipment or they cannot be removed in the normal ways, follow the
steps specified below.
(1)
Sample unload
Click on the
[Sampler Unload]
button to remove the wafer from the equipment.
When the Wafer Control dialog is displayed, make sure there is no wafer in the slot. First confirm
that the slot is empty, and then unload the wafer.
Fig. 5-3-1 Wafer Unload Button
Fig. 5-3-2 Wafer Control
Summary of Contents for MFM65S2RFFFLFL
Page 19: ...14 ME12058B Operation Section Goniometer Figure Fig 3 1 2 Gonimeter...
Page 37: ...32 ME12058B Operation Section Fig 5 2 5 Power Switch 5 6...
Page 67: ...62 ME12058B Operation Section Fig A3 1 2 Power Circuit Diagram 2...
Page 69: ...64 ME12058B Operation Section A4 2 MSDS of Beryllium...
Page 70: ...65 ME12058B Operation Section...
Page 71: ...66 ME12058B Operation Section...
Page 72: ...67 ME12058B Operation Section...
Page 73: ...68 ME12058B Operation Section...
Page 74: ...69 ME12058B Operation Section...
Page 75: ...70 ME12058B Operation Section...
Page 76: ...71 ME12058B Operation Section...
Page 77: ...72 ME12058B Operation Section...
Page 78: ...73 ME12058B Operation Section...
Page 79: ...74 ME12058B Operation Section...
Page 80: ...75 ME12058B Operation Section A4 3 MSDS of Lead...
Page 81: ...76 ME12058B Operation Section A4 4 MSDS of Lithium...
Page 82: ...77 ME12058B Operation Section...
Page 83: ...78 ME12058B Operation Section...
Page 84: ...79 ME12058B Operation Section A4 5 MSDS of Mercury...
Page 85: ...80 ME12058B Operation Section...
Page 86: ...81 ME12058B Operation Section...
Page 87: ...82 ME12058B Operation Section...
Page 88: ...83 ME12058B Operation Section...
Page 89: ...84 ME12058B Operation Section...
Page 90: ...85 ME12058B Operation Section A4 6 MSDS of Mechanical Lubricating Grease...
Page 91: ...86 ME12058B Operation Section...
Page 92: ...87 ME12058B Operation Section...
Page 93: ...88 ME12058B Operation Section...
Page 94: ...89 ME12058B Operation Section...
Page 95: ...90 ME12058B Operation Section...
Page 96: ...91 ME12058B Operation Section...
Page 97: ...92 ME12058B Operation Section A4 7 MSDS of Ethanol...
Page 98: ...93 ME12058B Operation Section...
Page 99: ...94 ME12058B Operation Section...
Page 100: ...95 ME12058B Operation Section...
Page 101: ...96 ME12058B Operation Section...
