Rigaku MFM65S2RFFFLFL, Instruction Manual, Page: 2 / 102

Thank you for your purchase of Rigaku’s product.
This manual describes the correct use of the product as well the usage precautions to be observed.
To obtain full, expected performance from the product, thoroughly read this manual.
Also, store this manual at an easily accessible place so that you can promptly refer to it whenever
necessary.
If you have any questions, problems, or emergencies, please contact the personnel in charge of
Service at Rigaku at one of the addresses below.
USA
Rigaku Americas Corporation
9009 New Trails Drive
The Woodlands, TX 77381
USA Tel : +1-281-363-1033
Fax: +1-281-364-3628
URL:http://www.Rigaku.com
JAPAN
Rigaku Corporation
Semiconductor Instruments Division
3-9-12 Matsubara-cho,
Akishima-shi,
Tokyo 196-8666, JAPAN Tel : +81-42-545-8102
Fax: +81-42-54-0310
URL:http://www.rigaku.co.jp
NOTICE
1. This manual may not be disclosed to a third party or copied, in whole or in part, without the
written consent of Rigaku.
2. As a rule, one set of the instruction manual has to be purchased for each product.
3. If there are any missing or incorrectly collated pages in the delivered instruction manual,
contact the nearest Rigaku branch office or sales office for a replacement manual.
4. In no event will Rigaku be responsible for the results of the use of this manual.
5. The contents of this manual are subject to change without prior notice.