1-8 System description
SP2-1 scanning probe specification (continued)
Probe type:
3 axis measurement (X, Y and Z axes)
Linear and parallel motion in all axes.
Measurement range:
±
4.5mm (
±
0.177 in.) in X, Y and Z axes mounted
vertically.
Overtravel range:
18mm (0.709 in.) with 100mm (3.937 in.) stylus in X
and Y axes, 5mm (0.197 in.) in Z axis.
Resolution:
1
µ
m (0.00004 in.) in X, Y and Z axes.
Linearity:
±
2
µ
m (0.00008 in.) (typical) over 2mm (0.079 in.)
range in X, Y and Z axes.
Straightness:
±
2
µ
m (0.00008 in.) (typical) over 2mm (0.079 in.)
range in X, Y and Z axes.
Spring rate:
3.5N/mm (20 lbf.in) in X, Y and Z axes
±
20% with
100mm (3.937 in.) stylus.
Damping:
50% to 85% in X, Y and Z axes (typical) at 23
°
C
(73.4
°
F).
Mounting:
∅
35mm (1.138 in.) or
∅
50mm (1.969 in.) steel
shank.
Weight:
Probe -
890g (31oz).
Stylus -
50g to 80g (2oz to 3oz) typical.
Operating temperature:
+10
°
C to +40
°
C (+50
°
F to + 104
°
F).
Power supply:
Voltage -
+12V
Current -
150mA max
Outputs:
X, Y and Z axes:
EIA-422-A phase quadrature, line drivers.
User Function Switch:
OCT Format, Contact rating 30V dc, 16mA max.
Stylus Overtravel:
OCT Format, Contact rating 30V dc, 16mA max.
Error:
OCT Format, Contact rating 30V dc, 16mA max.
Connector:
19 way size 14 - rear or side exit options, Orientation X.
