Quorum Q150T S, Instruction Manual

Page: 76 / 92

Q150T Sample Preparation System
10473 - Issue 5
76
Q150T - Instruction Manual
Error messages Description of fault
shorts between the source terminals and the insert base.
Process stopped due to FTM
crystal failure
The FTM has stopped oscillating during the coating.
Interlock has been activated
process stopped
This is most likely caused by the top cover being opened
during a cycle
Unable to strike plasma The required sputter voltage has been applied for 10
second and the plasma has not struck. Check target is
connected and that the Argon to turned on
Short on Sputter output. Please
check target The target shield needs cleaning. As required output
current is seen but the target voltage is less than 80V.
System failed to achieve operational
Vacuum The system has been pumping for the Max pump down
time and has not achieved the operation vacuum
Carbon Rod insert not found A profile has been run that using the Carbon Rod insert
and it is not fitted in the chamber lid.
Carbon String insert not found A profile has been run that using the Carbon String insert
and it is not fitted in the chamber lid.
Evaporation insert not found
A profile has been run that using the Evaporation insert
and it is not fitted in the chamber lid.
Please contact your supplier a
problem has been found with the
safety interlock.
Continue with coating?
For safety the interlock operates in two ways and it has
been detected that one has failed. Turn the system off and
back on after 10 seconds to clear. If message is repeated,
please contact your supplier.
System PSU overtemperature
Pleaes turn off system and alow to
cool down
The power supply is over heating: coating will be disabled
until the system has cooled sufficiently.
Current less than expected.
Process terminated
Seen in evaporation processes when the current through
the source is lower than expected or zero. Indicates that
the source is open circuit/broken.
Rod voltage less than 4V.
Process terminated
Seen in rod evaporation processes when the voltage
between the evaporation source terminals is less than 4V.
Indicates that the rods have been incorrectly set up or
there is a conduction path between the terminals of the
insert. Check rods and clean the insert.