Q150T Sample Preparation System
Q150T - Instruction Manual
13
10473 - Issue 5
2.3.1
Gas Connections
1.
Connect a suitable argon supply at a regulated input of 0.3bar (4psi) to the quick
connect
Argon
gas connector on the rear panel (see
Figure 2-1
. If you prefer, you
can use argon for both process and purge supplies.(recommended if coating with
oxidising targets). To do so, install a 'T' piece across both gas inlets.
2.
Connect a suitable nitrogen supply at a regulated input of 0.3bar (4psi) to the
quick connect
Nitrogen
connector on the rear panel. Air may be used in place of
nitrogen for venting (not recommended for oxidising targets) but it is important to
fit the filter (part no. 12842) to prevent ingress of dust (see Figure 2-2).
Failure to
connect this filter could prevent the system venting at the end of a cycle.
Connectors are push-fit and will 'snap' into a locked position. To release a connector,
depress the metal tongue.
Figure 2-2.
Gas connectors with filter (part no. 12842) fitted to purge gas inlet
Summary of Contents for Q150T S
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