Q150T Sample Preparation System
10473 - Issue 5
46
Q150T - Instruction Manual
6.2.3
Vacuum
This option allows you to change the default settings for pumping/venting cycles used in
both sputter coating and evaporation sequences. The Q150T uses these settings in all
profiles.
To change the settings, tap on
Vacuum
and then tap on the
Edit
button. The Vacuum
properties are displayed (see
Figure 6-5
and
Table 14
).
Figure 6-5.
Vacuum parameters
Table 14
Vacuum parameters
Name
Default
Value
Minimum
Value
Maximum
Value
Comment
Operational Vacuum
(mBar)*
1x10
-3
5x10
-3
1x10
-1
The vacuum the system
achieves before proceeding to
extra pump time.
Vent Time (Seconds)*
70
10
240
Time to vent the chamber after
the turbo has reached 50%.
When using the extended height
cylinder extend the vent time to
120 seconds.
Flush Time (Seconds)*
70
10
240
Flush Vac Threshold
(mBar)*
8
0.1
100
Vacuum the system will pump
down to before venting with
nitrogen during a flush
Extra Pump time*
120
1
600
Time waited after the
operational vacuum is achieved
Pump Hold Time
(Hours)*
2
0.1
24
The time the system will wait for
user input before venting if
pump hold enabled
Max Pumpdown
Time**
600
60
600
Maximum time the system will
wait for the chamber to reach
the
Safe outgas threshold
and
60% turbo speed.
Safe outgas threshold
1
5x10
-2
2
Sets the vaccum that needs to
be achieved during
Max
Pumpdown Time
.
* Admin group level required to edit this property
** Engineer group level required to edit this property
1.
To edit a parameter, tap on its value.
2.
Change the value as required. The instrument displays a dialog box for editing
purposes, with either a numeric keypad or keyboard as required. The dialog box
also shows the allowed values for the parameter.
Summary of Contents for Q150T S
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