Q150T Sample Preparation System
10473 - Issue 5
86
Q150T - Instruction Manual
0.0
5.0
10.0
15.0
20.0
25.0
30.0
35.0
40.0
60
70
80
90
100
110
120
130
140
150
Depo sition Curren t (mA)
D
e
p
o
si
ti
o
n
R
a
te
(
n
m
/m
in
)
7*10-3
1*10-2
Figure 9-2.
Sputtering Deposition Rate using Chromium
Chromium tooling factor = 2.28
Summary of Contents for Q150T S
Page 92: ......
