MKS 1579A, Instruction Manual

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1579A/579A Chapter 9: MFC Sizing Guidelines
65
Chapter 9: MFC Sizing Guidelines
General
To select the correct MFC for an application, you must determine the:
•
flow controller range
•
appropriate valve configuration
The flow controller range depends on the desired flow rate and the gas correction factor for the gas
to be used. MKS states the flow controller ranges based on flow rate of nitrogen; the flow rate for
other gases may vary.
The proper valve configuration depends upon the flow range, inlet pressure, and differential
pressure across the unit, and density of the gas. Proper valve configurations have been
established for all standard flow ranges flowing nitrogen under standard operating pressures.
These configurations are suitable for virtually all gases and pressure conditions.