MKS 1579A, Instruction Manual

Page: 23 / 87

1579A/579A Chapter 3: Connectors and Control Elements
23
Electrical Connector
1579A/B / 579A/B, Analog Unit
(15 pol. Sub-D, male)
Pin ± 15 V Supply 24 V Supply Note
1 Reserved Reserved
2
Flow Signal
(0 to +5 V) Flow Signal
(0 to +5 V) Referenced to pin 11 and 12
3 Valve Close
1
Valve Close
1
4 Valve Open
1
Valve Open
1
Connect to pin 5 to activate
5
±
15 V Supply Common
reserved
6
- 15 V Supply + 24 V Supply Common
7 + 15 V Supply +24 V
8 Setpoint Input
1
(0 to +5 V)
Setpoint Input
1
(0 to +5 V)
Referenced to pin 11 and 12
9
NC NC
10
NC NC
11 Signal Common Signal Common
12 Signal Common Signal Common
13
NC NC
14 NC NC
15 Chassis Ground Chassis Ground Shield, Case
Figure 5: 15-pol. connector
For use with control units from MKS Instruments (PR 4000, 647 etc.) we recommend to use the
standard cables of the manufacturer.
Note Any appropriate 0 to +5 V signal of less than 20
Ω
source impedance
can be used to supply a set point signal to pin 8. Cable must be
equipped with a ferrite (Würth 742 712 21).
____________________
1
Not applicable with mass flow meter 579A/B