MKS 1579A, Instruction Manual

Page: 49 / 87

1579A/579A Chapter 6: Operation (Profibus Units)
49
Full Receive Data
Name: FLOW_MFC
Type: Cyclic Read (full)
Size: 18
Description: Analog Input Transducer Block. This block is used if a full setup was
performed.
Parameters:
Name Add. Type Comment
HIGH_LIMIT_ALARM 1:0 uint:1 (flow > HIGH_LIMIT), Hysteresis = 0.5% *
LOW_LIMIT_ALARM 1:1 uint:1 (flow < LOW_LIMIT) , Hysteresis = 0.5% *
SYSTEM_ERROR 1:2 uint:1 any severe system error condition
HIGH2_LIMIT_ALARM 1:3 uint:1 (flow > HIGH2_LIMIT), Hysteresis = 0.25%
LOW2_LIMIT_ALARM 1:4 uint:1 (flow < LOW2_LIMIT), Hysteresis = 0.25%
VALVE_CLOSED 1:5 uint:1 (THERMAL_MASS_FLOW_RATE < 1%) &&
(VALVE_OVERRIDE == FLOW_OFF)
PURGE 1:6 uint:1 THERMAL_MASS_FLOW_RATE > 110%
OVER_TEMPERATURE 1:7 uint:1 INTERNAL_TEMP > MAX_TEMP
VALVE_DRIVE_ALARM 0:0 uint:1 VALVE_DRIVE_LEVEL > MAX_VTP
CALIBRATION_
RECOMMENED 0:1 uint:1 TIME_TO_CAL count down expired
UNCALIBRATED 0:2 uint:1 if a disabled or no table is used
CONTROLLER_ERROR 0:3 uint:1 abs (setp - flow) greater for a longer time period
MEMORY_FAILURE 0:4 uint:1 E2PROM checksum error
UNEXPECTED_
CONDITION 0:5 uint:1 any process error condition
Reserved 0:6 uint:2
THERMAL_MASS_FLOW
_RATE 2:0 long in [FLOW_UNIT] in 10E-4 steps
INTERNAL_TEMP 6:0 long temperature in [° C] (in 10E-4 steps)
VALVE_DRIVE_LEVEL 10:0 long 0 .. 100% (in 10E-4 steps)
0% = valve is closed
100% = valve is in purge position (full open)
FLOW_TOTALIZED 14:0 long in sl / sm3 (in 10E-4 steps)
i.e. min. 298 days for a 500 range.
*) Hysteresis is +/- 0.25% (i.e. 0.5% in total) based on actual limit