MKS 1579A, Instruction Manual

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FRM 13345 Rev.E
HEALTH AND SAFETY FORM
This form must be completed and returned with equipment or service will not be performed.
Return material authorization number (RMA#): (if applicable)
Return to stock number (RTS#), (if applicable):
Trade in number (if applicable):
MKS Part Number: Section 1: (one Instrument per form)
MKS Serial Number:
Section 2: Has this equipment been used? (Please check appropriate boxes)
No – Still in MKS packaging
No – Unit unpacked, but never installed in a system.
Yes – Used only with clean, dry inert gas (For Example: Air, N2, Ar, He)
Yes – Used with chemicals, non-inert gases, biological or radioactive agents.
Identify all materials:
Yes – Used in a Semiconductor Copper process. Equipment must be double bagged. Label outside bag and
packing slip, Copper Part. Label final shipping container Copper Part and place a strip of ORANGE TAPE on the
container.
Has equipment been purged? No Yes purged with what?
Has equipment been flushed? No Yes flusched with what?
Has equipment been decontaminated? No Yes explain process:
How many months in use?
Section 3: Detailed failure information or description or required service or reason for return.
Section 4: Company or Organization (mandatory information)
Company:
Adress:
City: State: Zip:
Printed Name: Signature:
Date: Phone #:
Email: Fax #:
End User (if applicable):
For MKS USE only:
MKS Subsidiary or Agent:
Contact Name:
Customer #:
Maximum Credit allowed (TBD after inspection)
ALL PRODUCTS MUST BE RETURNED IN SEALED BAGS
MKS will not accept delivery of equipment that has been chemically, radioactively or biologically contaminated, without
written evidence of decontamination or laboratory analyses. Alternately, we will require evidence that the biological
process is not harmful.