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INV:
Pressure control with variable conductance (downstream control):
The control valve regulates the pumping speed of the vacuum system.
The valve plate moves in opening direction when the pressure in the vacuum
system rises.
Figure 3-3
Controller types
The CMOVE 1250 features two controller types:
Auto:
Auto is a PI (proportional/integral) controller type working with control speeds
1 … 99 (1 = slow, 99 = fast).
This controller type is used for fast optimization of the process.
PID:
The gain (Kp), reset time (Tn), and derivative time (Tv) of the PID
(proportional/integral/derivative) controller type are user-definable.
The PID controller is used when good control to a setpoint (nominal value)
combined with a fast response is required.
Vacuum pump
Pressure sensor
Gas inlet
Vacuum
system
Valve
CMOVE 1250
