Section 1: S535 system
S535 Wafer Acceptance Test System Administrative Guide
1-2
S535-924-01 Rev. B / January 2019
The S535 systems have flexible hardware configurations that allow you to customize them to your
specific needs. See the following table for a description of the main system configuration options.
S535 system configuration options
DC source-measure units (SMUs)
Two to 16 SMU channels
Maximum number of SMUs depends on other items in
the system rack
Model 2461-SYS System SourceMeter
®
instruments
(quantity: 0 to 12)
Model 2636B System SourceMeter
®
instruments
(quantity: 2 to 8)
Model 2450 System SourceMeter
®
instrument (for use as
TSP
®
master controller only; quantity: 1)
6-slot switching matrix
One Model 707B Switch Matrix Mainframe with Model 7530
switch cards (quantity: 2 to 6)
Optional capacitance-voltage (C-V)
One channel of C-V (using one Model 4200A-SCS with one
Model 4210-CVU card)
Optional instruments
Model DMM7510 7-1/2 Digit Graphical Sampling Multimeter
(quantity: 0 to 2)
Included with each system
Computer inside cabinet
External 24-inch flat-panel monitor and keyboard tray
mounted on exterior of cabinet
Keithley Test Environment (KTE) system software
LO patch panel
Safety interlock system
Adjustable cable support arm
Other options
Advanced seismic securement kit for additional
resistance to seismic forces
Optional accessories
Optional items and accessories that may accompany the S535 system:
Cables to connect to the test fixture or the probe card adapter
9139A-PCA (probe card adapter)
9139B-PCA (probe card adapter)
Advanced seismic securement kit
