S535 Wafer Acceptance Test System Administrative Guide
Section 3: Equipment startup
S535-924-01 Rev. B / January 2019
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Figure 40: Interlock indicator
Once the interlock has been activated, you must clear the cause of the interlock activation.
To clear the interlock activation:
1.
Follow the instructions on the computer.
2.
Make sure the front and rear doors are closed.
3.
Make sure the DUT interlock is properly set for safe operation.
4.
Close the DUT safety shield.
5.
The software must recover before you can continue normal operation. You may need to rerun
your tests.
